US 5,848,086 AGranted

Electrically confined VCSEL

AssigneeMotorola, Inc.

InventorsMichael S. Lebby, Jamal Ramdani, Wenbin Jiang

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Abstract

A semiconductive substrate (101) with a surface (102) having a first stack of distributed Bragg reflectors (109) disposed on the surface (102) of the semiconductive substrate (101) that has dot patterned features (252 and 354). A first cladding region (113) is disposed on the first stack of distributed Bragg reflectors (109). An active area (117) is disposed on the first cladding region (113) with a second cladding region (123) disposed on the active area (117). A second stack of distributed Bragg reflectors (127) is disposed on the second cladding region (123). The dot patterned features produce an offset in the stacks of reflectors and a portion of the second stack of distributed Bragg reflectors is oxidized, using the offset, to limit the current path.

Claims16

Dependent claims

An electrically confined vertical cavity surface emitting laser comprising:

a substrate structure having a surface with an opening defined therein having a desired shape, the opening defining a current path within a continuous step;
a first stack of distributed Bragg reflectors disposed on the surface of the substrate structure overlying the opening and the continuous step in the surface of the substrate structure;
a first cladding region disposed on the first stack of distributed Bragg reflectors, the first cladding region overlying the opening and the continuous step in the surface of the substrate structure;
an active area disposed on the first cladding region, the active area including a first barrier region, a second barrier region, and a quantum well with the quantum well being positioned therebetween, the active area overlying the opening and the continuous step in the surface of the substrate structure;
a second cladding region disposed on the active area, the second cladding region overlying the opening and the continuous step in the surface of the substrate structure;
and
a second stack of distributed Bragg reflectors disposed on the second cladding region and overlying the opening and the continuous step in the surface of the substrate structure, the second stack including portions of aluminum oxide, the portions of aluminum oxide being positioned circumferentially adjacent and outside the current path and thereby confining current carriers to the current path.

4 more elements

An electrically confined vertical cavity surface emitting laser comprising:

a substrate structure having a surface with a first island, a second island, and an opening, the first island and the second island being disposed on the surface of the substrate with the opening therebetween and the opening have a width;
a first stack of distributed Bragg reflectors disposed on the substrate structure, the first stack of distributed Bragg reflectors including a first plurality of alternating layers with the first plurality of alternating layers covering the first island, the second island, and the opening of the first layer;
a first cladding region disposed on the first stack of distributed Bragg reflectors, the first cladding region covering the first island, the second island, and the opening of the first layer;
an active area disposed on the first cladding region, the active area including a first barrier region, a second barrier region, and a quantum well with the quantum well being positioned therebetween, the active area covering the first island, the second island, and the opening of the first layer;
a second cladding region disposed on the active area;
and
a second stack of distributed Bragg reflectors including a second plurality of alternating layers and a second layer of aluminum arsenide having portions of aluminum oxide disposed on the second cladding region and covering the opening, the portions of aluminum oxide encroaching the opening, thereby confining current carriers to the active area.

4 more elements

Dependencies are inferred from the claim text.