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US 5,847,823 AGranted
Surface inspection tool
AssigneeInternational Business Machines Corporation
InventorsWayne Isami Imaino, Anthony Juliana, Jr., Milton Russell Latta, Charles H. Lee, Wai Cheung Leung, Hal J. Rosen, James Hammond Brannon
Life of this patent
Estimating the term…
Abstract
A calibration disk for a laser based inspection tool (LIT) for inspecting planar surfaces is described. The calibration disk has a plurality of overlapping bumps forming a circular ring with a width of one bump. The circular ring of bumps forms a feature of a known width and position on a disk which can be used to adjust one or more LIT's to yield calibrated results.
Claims6
A calibration disk for an optical inspection tool comprising:
- a disk shaped substrate having at least one substantially smooth planar surface with a plurality of overlapping bumps arranged in a circular pattern with a width of one bump;
- and
- a thin film coating.
Dependencies are inferred from the claim text.