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US 5,847,822 AGranted
Optical element inspecting apparatus
AssigneeAsahi Kogaku Kogyo Kabushiki Kaisha
InventorsMasayuki Sugiura, Masato Hara, Toshihiro Nakayama, Atsushi Kida
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AssigneeAsahi Kogaku Kogyo Kabushiki Kaisha
InventorsMasayuki Sugiura, Masato Hara, Toshihiro Nakayama, Atsushi Kida
Estimating the term…
An optical element inspecting apparatus for detecting an optical defect of an optical element to be inspected. The inspection apparatus includes a diffusion plate, a device for emitting light towards the diffusion plate such that a diffused light diffused by the diffusion plate is incident upon an optical system including at least the optical element, and a device for intercepting a part of the diffused light so that the part of the diffused light is not incident upon the optical system. The light intercepting device is positioned substantially in a plane perpendicular to an optical axis of the optical system, between the optical system and the diffusion plate, substantially at a focal point of the optical system.
An optical element inspecting apparatus for detecting an optical defect of an optical element to be inspected, comprising:
An optical element inspecting apparatus for detecting an optical defect of an optical element to be inspected, comprising:
An optical lens inspecting apparatus for detecting a defect of an optical element to be inspected, comprising:
An optical element inspecting apparatus for detecting an optical defect of an optical element to be inspected, comprising:
Dependencies are inferred from the claim text.