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US 5,847,486 AGranted
Love-wave device including a thin film of TA or W
AssigneeMurata Manufacturing Co., Ltd.
InventorsMichio Kadota, Toshimaro Yoneda, Naoki Mizoguchi
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Abstract
An inexpensive Love-wave device having a wide frequency difference between its resonant and antiresonant frequencies includes a Y-cut substrate made from LiNbO.sub.3 for X propagation. An interdigital transducer including a thin film of Ta or W is located on the substrate for exciting a Love wave.
Claims18
A Love-wave device comprising:
- a Y-cut LiNbO.sub.3 substrate for X-propagation;
- and
- an interdigital transducer for exciting a Love wave,
- said transducer consisting essentially of a thin film of W located on said Y-cut substrate.
1 more element
A Love-wave device comprising:
- a Y-cut LiNbo.sub.3 substrate for X-propagation;
- and
- an interdigital transducer for exciting a Love wave,
- wherein said transducer comprises a thin film of Ta located on said Y-cut substrate.
1 more element
A Love-wave device comprising:
- a Y-cut LiNbO.sub.3 substrate for X propagation;
- and
- an interdigital transducer for exciting a Love wave;
- said transducer comprises a thin film of Ta located on said Y-cut substrate;
- wherein
- said thin film of Ta has a normalized film thickness H.sub.Ta /.lambda. of about 0.03 to 0.15, where H.sub.Ta represent a film thickness of said thin film of Ta and .lambda. represents a wavelength of said Love wave.
3 more elements
A Love-wave device comprising:
- a Y-cut LiNbO.sub.3 substrate for X propagation;
- and
- an interdigital transducer for exciting a Love wave;
- said transducer consisting essentially of a thin film of W located on said Y-cut substrate;
- wherein
- said thin film of W has a normalized film thickness H.sub.W /.lambda. of about 0.028 to 0.15, where H.sub.W represent a film thickness of said thin film of W and .lambda. represents a wavelength of said Love wave.
3 more elements
A Love-wave device comprising:
- a Y-cut substrate for X-propagation;
- and
- an interdigital transducer for exciting a Love wave,
- wherein said transducer comprises a thin film of Ta located on said Y-cut substrate, a SAW velocity of said Y-cut substrate being higher than that of Ta.
1 more element
A Love-wave device comprising:
- a Y-cut substrate for X-propagation;
- and
- an interdigital transducer for exciting a Love wave,
- said transducer consisting essentially of a thin film of W located on said Y-cut substrate, a SAW velocity of said Y-cut substrate being higher than that of W.
1 more element
Dependencies are inferred from the claim text.