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US 5,847,439 AGranted
Integrated circuit having a void between adjacent conductive lines
AssigneeMicron Technology, Inc.
InventorAlan R. Reinberg
Life of this patent
Estimating the term…
Abstract
The invention proposes methods for producing integrated circuits wherein the dielectric constant between closely spaced and adjacent metal lines is approaching 1. One method of the invention uses low-melting-point dielectric to form a barrier form a void between conductive lines. Another method of the invention uses sidewall film to form a similar barrier.
Claims23
An integrated circuit, comprising:
- a substrate;
- a first conductive line on said substrate;
- a second conductive line on said substrate, said second conductive line in spaced relation to said first conductive line;
- and
- a dielectric material having a melting point lower than 500 degrees Celsius and being disposed over said first and second conductive lines partially defining a cavity between said first and second conductive lines.
2 more elements
A semiconductor die, comprising:
- a substrate;
- a first conductive line formed on said substrate;
- a second conductive line formed on said substrate in spaced relation to said first conductive line to define a gap;
- and
- a dielectric film extending across said gap above said conductive lines to define a cavity between said lines, said dielectric film being one of polystyrene, polypropylene, and chalcogenide glass.
2 more elements
A semiconductor device comprising:
- a first conductive line having a first width;
- a second conductive line having a second width and positioned generally adjacent to said first conductive line to define a gap therebetween;
- a first distinct dielectric section deposited upon said first conductive line and having said first width, said first distinct dielectric section being expandable subsequent to deposition to a width greater than said first width;
- a second distinct dielectric section deposited upon said second conductive line and having said second width, said second distinct dielectric section being expandable subsequent to deposition to a width greater than said second width to contact said first distinct dielectric section and define a cavity between said first and second conductive lines.
1 more element
An integrated circuit, comprising:
- a substrate;
- a first conductive line on said substrate;
- a second conductive line on said substrate and in spaced relation to said first conductive line;
- a first layer of dielectric material on said first conductive line;
- and
- a second layer of dielectric material on said second conductive line, wherein said first layer of dielectric material and said second layer of dielectric material move toward one another to define a void between said first conductive line and said second conductive line in response to heating said first and second layers of dielectric material.
3 more elements
An integrated circuit, comprising:
- a substrate;
- a first conductive line on said substrate;
- a second conductive line on said substrate and in spaced relation to said first conductive line;
- a first layer of material being disposed on said first conductive line to form a first pillar;
- a second layer of material being disposed on said second conductive line to form a second pillar, said first pillar having a sidewall facing said second pillar, and said second pillar having a sidewall facing said first pillar;
- and
- a dielectric film disposed on each of said sidewalls, wherein said first layer of material and said second layer of material move toward one another to join said dielectric film on each of said sidewalls to define a void between said first conductive line and said second conductive line in response to heating said first and second layers of material.
4 more elements
Dependencies are inferred from the claim text.