Light emitting device having current blocking structure
AssigneeNEC Corporation
InventorYasutaka Sakata
Life of this patent
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AssigneeNEC Corporation
InventorYasutaka Sakata
Estimating the term…
A pair of SiO.sub.2 stripe masks are formed on a p-InP substrate (31) with a separation of 1.5 .mu.m in 011! direction and an optical waveguide including a p-InP clad layer (32), an active layer (33) and an n-InP clad layer (34) is formed on the p-InP substrate (31) at the 1.5 .mu.m exposed area according to MOVPE selective growth process. Both sides of the optical waveguide are buried with pnpn current blocking structure according to the MOVPE selective growth, wherein a p-InP layer (36) and n-InP layer (37) are formed, then a surface of the n-InP layer (37) is inverted to p-type to form a p-InP inversion layer (38) according to Zn open tube diffusion process carried out in MOVPE system, thereby the interconnection between the n-InP layer (37) and the n-InP clad layer (34) is prevented, and then a p-InP layer (39) and n-InP layer (40) are formed. An n-InP layer (41) is formed thereon.
A photosemiconductor device, comprising:
A photosemiconductor device, comprising:
A photosemiconductor device, in which an optical waveguide containing an active layer is directly formed on a first electrical conduction type semiconductor substrate by selective growth;
A photosemiconductor device, in which a second electrical conduction type semiconductor layer is formed on a first electrical conduction type semiconductor substrate;
Dependencies are inferred from the claim text.