Deflection system
AssigneeACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung mbH
InventorsReinhold Schmitt, Stefan Lanio, Thomas Jasinski
Life of this patent
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Abstract
A deflection system (6) for a charged particle beam (2), in particular for rrangement in an objective lens for a charged particle beam device with a deflection means (60) for generating a magnetic field acting on the charged particle beam (2) and a shield (61) for avoiding eddy currents, which surrounds the deflection means and guides the formed outer magnetic field. The shield (61) consists, transversely to the direction of the charged particle beam (2), of at least one soft magnetic layer which is preferably formed as a strip material and rolled up to a cylinder together with an electrically insulating layer.
Claims16
A deflection system (6) for a charged particle beam (2) comprising
- a deflection means (60) for generating a magnetic field acting on the charged particle beam, and
- a shield (61) for avoiding eddy currents, which surrounds the deflection means and guides the formed outer magnetic field,
- characterised in that the shield (61) consists of at least one soft magnetic layer (61a) and an electrically insulating layer (61b) transversely to the direction of the charged particle beam (2).
A deflection system (6) for a charged particle beam (2) comprising
- a deflection means (60) for generating a magnetic field acting on the charged particle beam, and
- a shield (61) for avoiding eddy currents, which surrounds the deflection means and guides the formed outer magnetic field,
- characterised in that the shield (61) consists of a soft magnetic and electrically insulating strip material rolled up to a cylinder.
An objective lens (5) for a charged particle beam device (1) comprising
- a) a magnetic lens (50) for focussing a charged particle beam (2), and
- b) a deflection system (6) disposed within the magnetic lens (50), containing
- b1) a deflection means (60) for generating a magnetic deflection field and
- b2) a shield (61) for avoiding eddy currents, which surrounds the deflection means and guides the formed outer magnetic deflection field,
- characterised in that the shield (61) consists of at least one soft magnetic layer (61a) and an electrically insulating layer (61b) transversely to the direction of the charged particle beam (2).
An objective lens (5) for a charged particle beam device (1) comprising
- a) a magnetic lens (50) for focussing a charged particle beam (2), and
- b) a deflection system (6) disposed within the magnetic lens (50), containing
- b1) a deflection means (60) for generating a magnetic deflection field and
- b2) a shield (61) for avoiding eddy currents, which surrounds the deflection means and guides the formed outer magnetic deflection field,
- characterised in that the shield consists of a soft magnetic and electrically insulating strip material rolled up to a cylinder.
A charged particle beam device (1) comprising
- a) a source (4) for generating a charged particle beam (2),
- b) and an objective lens (5) having
- b1) a magnetic lens (50) for focussing a charged particle beam (2) and
- b2) a deflection system (6) disposed within the magnetic lens (50), containing
- b21) a deflection means (60) for generating a magnetic deflection field and
- b22) a shield (61) for avoiding eddy currents, which surrounds the deflection means and guides the formed outer magnetic deflection field,
- characterised in that the shield (61) consists of at least one soft magnetic layer (61a) and an electrically insulating layer (61b) transversely to the direction of the charged particle beam (2).
A charged particle beam device (1) comprising
- a) a source (4) for generating a charged particle beam (2),
- b) and an objective lens (5) having
- b1) a magnetic lens (50) for focussing a charged particle beam (2) and
- b2) a deflection system (6) disposed within the magnetic lens (50), containing
- b21) a deflection means (60) for generating a magnetic deflection field and
- b22) a shield (61) for avoiding eddy currents, which surrounds the deflection means and guides the formed outer magnetic deflection field,
- characterised in that the shield consists of a soft magnetic and electrically insulating strip material rolled up to a cylinder.
Dependencies are inferred from the claim text.