US 5,846,878 AGranted

Method of manufacturing a wiring layer in a semiconductor device

AssigneeNEC Corporation

InventorShinichi Horiba

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Abstract

In a method of building up wiring with a protective insulator film as a mask, a precise and elaborate wiring pattern is formed. The method comprises a process of making up a conductive material film on the surface of a semiconductor substrate, a process of depositing a inorganic insulator film consisting of a semiconductor oxide film and a semiconductor nitride film in layers on the conductive material film, a process of making up an antireflection film for an irradiation light for sensitizing used in photo lithography which patterns photosensitivity resist film, a process of making up the photosensitivity resist film on the antireflection film to pattern in a predetermined shape, and a process of applying dry etching to the conductive material film and the antireflection film with the inorganic insulator film as a mask.

Claims2

Dependent claims

A method of manufacturing a wiring layer in a semiconductor device comprising the steps of:

forming a conductive material film comprised of an alloy on the surface of an insulator film on a semiconductor substrate;
depositing an inorganic film, which comprises one of a semiconductor oxide film and a semiconductor nitride film, on said conductive material film;
forming an antireflection film to an irradiation light for a sensitizing on said inorganic insulator film used in photo lithography which patterns photosensitivity resist film;
forming said photosensitivity resist film on said antireflection film to pattern in a wiring shape;
applying dry etching to said antireflection film and said inorganic insulator film with said patterned photosensitivity resist film as a mask;
removing said patterned photosensitivity resist film as a mask;
and
applying dry etching to said antireflection film for removing thereof and simultaneously to said conductive material film with said inorganic insulator film as a mask.

5 more elements

Dependencies are inferred from the claim text.