Method of measuring a semiconductor device and a method of making a semiconductor device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsTomoaki Ishida, Ryo Obara
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Abstract
A method of measuring a semiconductor device in forming a capacitor by successively laminating a dielectric film and an opposed electrode above an upper face of a charge storing electrode a surface of which is formed in an irregular shaper, including the steps of forming the irregular shape of the charge storing electrode and measuring an area of the charge storing electrode which is to constitute an effective area of the capacitor by an atomic force microscope.
Claims7
A method of measuring a semiconductor device in forming a capacitor by successively laminating a dielectric film and an opposed electrode above an upper face of a charge storing electrode a surface of which is formed in an irregular shape, said method comprising the steps of:
- forming the irregular shape of the charge storing electrode;
- and
- measuring an area of the charge storing electrode which is to constitute an effective area of the capacitor by an atomic force microscope.
A method of making a semiconductor device comprising:
- a first step of laminating an amorphous silicon on a silicon oxide film and patterning the amorphous silicon thereby forming a matrix of a charge storing electrode;
- a second step of forming silicon crystal nuclei on entire surfaces of the silicon oxide film and the matrix of the charge storing electrode;
- a third step of subjecting the silicon oxide film and the matrix of the charge storing electrode to a heat treatment thereby crystallizing the amorphous silicon and the silicon crystal nuclei of the matrix of the charge storing electrode whereby the surfaces are formed in an irregular shape;
- a fourth step of measuring heights of the silicon crystal nuclei on the silicon oxide film by an atomic force microscope;
- and
- a fifth step of conducting an etch back operation of the silicon crystal nuclei.
Dependencies are inferred from the claim text.