Loading patent…
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsManfred Neumann, Klaus Goedicke, Siegfried Schiller, Jonathan Reschke, Henry Morgner, Falk Milde, Fred Fietzke
Estimating the term…
A process an device for ion-supported vacuum coating. The process and the affiliated device is intended to permit the high-rate ating of large-surfaced, electrically conductive and electrically insulating substrates with electrically insulating and electrically conductive coatings with relatively low expenditure. The substrates are predominantly band-shaped, in particular plastic sheets with widths of over a meter. According to the invention, in an intrinsically known device for vacuum coating, alternating negative and positive voltage pulses are applied to the electrically conductive substrate or in electrically insulating substrates, to an electrode disposed directly behind them, e.g. the cooling roller, relative to the plasma or to an electrode that is disposed almost at plasma potential. The form, the voltage, and the duration of the pulses are adapted to the coating task and the material. The process is used particularly for depositing abrasion protection, corrosion protection, and barrier coatings. The user is the packaging industry, among others.
A process for ion-supported vacuum coating, for a high-rate coating of a substrate comprising at least one of a large-surfaced, electrically conductive or electrically insulating substrate with an electrically insulating coating and of an electrically insulating substrate with an electrically conductive coating, in which a plasma is produced between a coating source and the substrate to accelerate ions toward the substrate, said method comprising:
Dependencies are inferred from the claim text.