Method for cleaning workpiece

A method of cleaning a workpiece, comprising:

• at a first cleaning station, performing a preliminary cleaning process to remove particles from a workpiece;
• transferring the workpiece from the first cleaning station to a second cleaning station having an abrasive cloth;
• holding the workpiece at the second cleaning station;
• and
• at the second cleaning station, cleaning the workpiece to remove, from the workpiece, particles remaining on the workpiece after performance of said preliminary cleaning process by scrubbing the workpiece with a cleaning solution and said abrasive cloth of said second cleaning station, wherein said abrasive cloth of said second cleaning station is made of synthetic resin and has micropores in a surface contacting said workpiece, said synthetic resin having a hardness selected from a Shore D hardness ranging from 52 to 62, an Asker-C hardness of 80, a Shore A hardness ranging from 58 to 68 and a Shore C hardness ranging from 61 to 71.

A method of cleaning a workpiece, comprising:

• at a first cleaning station, performing a preliminary cleaning process to remove particles from a workpiece;
• transferring the workpiece from the first cleaning station to a second cleaning station having an abrasive cloth;
• holding the workpiece at the second cleaning station;
• and
• at the second cleaning station, cleaning the workpiece to remove, from the workpiece, particles remaining on the workpiece after performance of said preliminary cleaning process by scrubbing the workpiece with a cleaning solution and said abrasive cloth of said second cleaning station, wherein said abrasive cloth of said cleaning station is made of one of polyurethane foam and non-woven fabric composed of fibers bound together by urethane resin.

A method of cleaning a workpiece, comprising:

• at a first cleaning station, performing a preliminary cleaning process to remove particles from a workpiece;
• transferring the workpiece from said first cleaning station to a second cleaning station having an abrasive cloth;
• holding the workpiece at said second cleaning station;
• and
• at said second cleaning station, cleaning the workpiece to remove, from the workpiece, particles remaining on the workpiece after performance of said preliminary cleaning process by scrubbing the workpiece with a cleaning solution and said abrasive cloth of said second cleaning station;
• wherein said abrasive cloth is smaller than the workpiece and is moved relative to the workpiece.