US 5,846,329 AGranted

Plasma processing apparatus

AssigneeTokyo Ohka Kogyo Co., Ltd.

InventorsHisashi Hori, Kazuto Ohbuchi, Atsushi Matsushita, Kaoru Sakamoto

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Abstract

A plasma processing apparatus has first and second electrodes disposed around a tubular chamber for generating a plasma. Each of the first and second electrodes comprises a plurality of web-shaped electrode segments spaced by a constant distant and disposed substantially halfway around the chamber. Each of the web-shaped electrode segments has opposite ends fastened to a pair of respective insulators disposed diametrically opposite to each other across the chamber. The web-shaped electrode segments of the first electrode are electrically connected to each other by a conductor on one of the insulators, and the web-shaped electrode segments of the second electrode are electrically connected to each other by a conductor on the other conductors. The first electrode is connected to a high-frequency power supply, and the second electrode is connected to ground.

Claims21

Dependent claims

A plasma processing apparatus comprising:

a chamber having a substantially tubular shape with a closed upper end thereof;
a first electrode disposed on said chamber and connected to a high-frequency power supply;
a second electrode disposed on said chamber for generating a plasma between said second electrode and said first electrode, said second electrode being connected to ground or a power supply which supplies electric energy of a lower frequency than electric energy supplied by said high frequency power supply;
insulator means disposed outside of said chamber for having said electrodes secured thereto;
and
conductor means mounted on said insulator means;
each of said first electrode and said second electrode comprising a plurality of web-shaped electrode segments, said web-shaped electrode segments of said first electrode and said web-shaped electrode segments of said second electrode being vertically alternately arranged in spaced relationship, each of said web-shaped electrode segments having opposite ends fastened to said insulator means, said web-shaped electrode segments of said first electrode being electrically connected to each other by said conductor means, and said web-shaped electrode segments of said second electrode being electrically connected to each other by said conductor means.

4 more elements

Dependencies are inferred from the claim text.