Wafer wet processing device
AssigneeLG Semicon Co., Ltd.
InventorSuk-Bin Han
Life of this patent
Estimating the term…
Abstract
A wafer wet processing device which comprises a processing container containing side walls; means for introducing a processing solution to the lower portion of said container; means for removing the processing solution from the upper portion of said container; and a wafer carrier containing side walls and being open at the top and bottom thereof, said wafer carrier being slidably disposed within said processing chamber, wherein at least the lower portion of the side walls of said processing container is contiguous with the lower portion of the side walls of said wafer carrier so that the entirety of the processing solution is introduced within the wafer carrier.
Claims12
A wafer wet processing device which comprises:
- a processing container containing side walls;
- means for introducing a processing solution to the lower portion of said container;
- means for removing the processing solution from the upper portion of said container;
- and
- a wafer carrier containing side walls and being open at the top and bottom thereof, said wafer carrier being slidably disposed within said processing chamber so that the processing solution is introduced within the wafer carrier, wherein the walls of the processing container are inclined away from the walls of the wafer carrier so that the respective walls are contiguous at the bottom portion but extended from each other at the top portion thereof.
A wafer set processing device which comprises:
- a processing container containing side walls;
- means for introducing a processing solution to the lower portion of said container;
- means for removing the processing solution from the upper portion of said container;
- and
- a wafer carrier containing side walls and being open at the top and bottom thereof, said wafer carrier being slidably disposed within said processing chamber so that the processing solution is introduced within the wafer carrier, wherein at least the lower portion of the side walls of said processing container is contiguous with the lower portion of the side walls of said wafer carrier and wherein the faces of the contiguous walls of the processing container and the wafer carrier are corrugated and complementary, relative thereto.
A wafer set processing device which comprises:
- a processing container containing side walls;
- means for introducing a processing solution to the lower portion of said container;
- means for removing the processing solution from the upper portion of said container;
- and
- a wafer carrier containing side walls and being open at the top and bottom thereof, said wafer carrier being slidably disposed within said processing chamber so that the processing solution is introduced within the wafer carrier;
- wherein at least the lower portion of the side walls of said processing container is contiguous with the lower portion of the side walls of said wafer carrier and wherein a projection portion is provided at the lower portion of said wafer carrier and a groove portion is provided at the bottom of the processing container for receiving said projection portion.
Dependencies are inferred from the claim text.