US 5,844,822 AGranted

Simulation method for semiconductor device

AssigneeMitsubishi Denki Kabushiki Kaisha

InventorYasuaki Yoshida

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Abstract

A method for simulating and analyzing two-dimensional current and light distributions of a semiconductor laser including an active layer, a cladding layer, and a light absorbing layer includes obtaining initial values of light distribution and carrier distribution, setting a bias condition, and performing current and light distribution analyses. The calculation of the initial value of the two-dimensional light distribution includes calculating a provisional absorption coefficient of the light absorbing layer from the refractive index of the cladding layer, the refractive index of the light absorbing layer, and the laser light wavelength; obtaining a solution in which the real part of the propagation constant of the wave equation is a maximum, using the provisional absorption coefficient; and repeating the calculation, using a sequential approximation method, until the absorption coefficient in the propagation constant equals the absorption coefficient in the original light absorbing layer. The propagation constant in the active layer is then larger than in a light absorbing region. Thus, the center of the light distribution is located in the active layer and the solution, specifying a laser oscillation mode, can be automatically derived without special judgment criteria.

Claims4

Dependent claims

A method for simulating operation of a semiconductor device by analyzing two-dimensional current and light distributions of a semiconductor laser including an active layer, a cladding layer, and a light absorbing layer with a higher refractive index than the cladding layer, the simulation method comprising:

obtaining initial values of light distribution and carrier distribution;
setting a bias condition;
and
analyzing current and light distributions, wherein calculation of the initial value of the two-dimensional light distribution includes:
calculating a provisional absorption coefficient .alpha..sub.m of the light absorbing layer from a refractive index n.sub.1 of the cladding layer, a refractive index n.sub.2 of the light absorbing layer, and a light wavelength .lambda. from ##EQU7## obtaining a solution in which a real part of the propagation constant .beta. of the wave equation has a maximum, the equation being
.gradient..sup.2 E(x, y)+{n(x, y)k.sub.0 }.sup.2 -.beta..sup.2 !E(x, y)=0
where E is the light distribution, k.sub.0 is the wave number 2.pi./.lambda. of light with a wavelength .lambda..sub.0 in vacuum, and .gradient. is the operator represented by
.gradient..sup.2 =.differential..sup.2 /.differential.x.sup.2 +.differential..sup.2 /.differential.y.sup.2,
n is the complex refractive index depending on material constants and carrier concentration, and .beta. is the complex propagation constant:
.beta.=k.sub.0 {n.sub.r +i(.alpha..sub.z /2k.sub.0)},
wherein n.sub.r is the real part of a refractive index, i is the complex number, and .alpha..sub.2 is the absorption coefficient in the light traveling direction, using the provisional absorption coefficient .alpha..sub.m ;
and
repeating the calculation to obtain a solution of the wave equation utilizing a sequential approximation, with the solution obtained using the provisional absorption coefficient .alpha..sub.m as the initial value, until the value of the absorption coefficient .alpha..sub.2 in the propagation constant .beta. becomes the value in the original light absorbing layer.

10 more elements

A method for simulating operation of a semiconductor device by analyzing two-dimensional current and light distributions of a semiconductor device comprising a light waveguide including a core layer, and a cladding layer with a higher refractive index than the core layer, the simulation method comprising:

obtaining initial values of light distribution and carrier distribution;
setting a bias condition;
and
analyzing current and light distributions, wherein calculation of the initial value of the two-dimensional light distribution includes:
calculating a provisional absorption coefficient .alpha..sub.m of the cladding layer from a refractive index n.sub.1 of the core layer, the refractive index n.sub.2 of the cladding layer, and a light wavelength .lambda. from ##EQU8## obtaining a solution in which a real part of the propagation constant .beta. of the wave equation has a maximum, the equation being
.gradient..sup.2 E(x, y)+{n(x, y)k.sub.0 }.sup.2 -.beta..sup.2 !E(x, y)=0
where E is the light distribution, k.sub.0 is the wave number 2.pi./.lambda. of light with a wavelength .lambda. in vacuum and .gradient. is the operator represented by
.gradient..sup.2 =.differential..sup.2 /.differential.x.sup.2 +.differential..sup.2 /.differential.y.sup.2,
n is the complex refractive index depending on material constants and carrier concentration, and .beta. is the complex propagation constant:
.beta.=k.sub.0 {n.sub.r +i(.alpha..sub.z /2k.sub.0)},
wherein n.sub.r is the real part of a refractive index, i is the complex number, and .alpha..sub.z is the absorption coefficient in the light traveling direction, using the provisional absorption coefficient .alpha..sub.m ;
and
repeating the calculation to obtain a solution of the wave equation utilizing a sequential approximation with the solution obtained using the provisional absorption coefficient .alpha..sub.m as the initial value, until the value of the absorption coefficient .alpha..sub.z in the propagation constant .beta. becomes the value in the original cladding layer.

10 more elements

Dependencies are inferred from the claim text.