Loading patent…
AssigneeU.S. Philips Corporation
InventorsJohannes M. M. Van Kimmenade, Adrianus Van Der Pal, Jan Van Eijk
Estimating the term…
A positioning device (21, 31) with a drive unit (147, 149, 151; 69, 71) with which an object table (1, 5) is displaceable over a guide (141, 65) which is fastened to a frame (45) of the positioning device (21, 31). The positioning device (21, 31) includes a force actuator system (205) which exerts on the frame (45) a compensation force which has a moment about a reference point (P) of the frame (45) whose value is equal to a value of a moment of a force of gravity acting on the object table (1, 5) about the reference point (P), and whose direction is opposed to a direction of the moment of said force of gravity. The use of the force actuator system (205) prevents the frame (45) from vibrating or being elastically deformed when a point of application on the frame (45) of the force of gravity is displaced relative to the frame (45) during a displacement of the object table (1,5). The accuracy with which the object table (1, 5) can be positioned relative to the guide (141, 65) by the drive unit (147, 149, 151; 69, 71) is accordingly not adversely affected by such vibrations or deformations. The positioning device (21, 31) is used in a lithographic device for the manufacture of integrated semiconductor circuits. The lithographic device includes a first positioning device (21) with which a substrate holder (1) is displaceable relative to a focusing system (3), and a second positioning device (31) with which a mask holder (5) is displaceable relative to the focusing system (3). A special embodiment of a lithographic device includes a joint force actuator system (205) for the first positioning device (21) and the second positioning device (31), by which system displacements of the centers, of gravity of both the substrate holder (1) and the mask holder (5) can be compensated. The force actuator system has three force actuators (205) which are integrated with three dynamic isolators (51) with which a machine frame (45) of the lithographic device rests on a base (39).
A positioning device with an object table and a drive unit by which the object table is displaceable parallel to at least an X-direction over a guide which is fastened to a frame of the positioning device, wherein the positioning device is provided with a force actuator system controlled by an electric controller and exerting a compensation force on the frame during operation, the electric controller comprising a feedforward control loop and the compensation force has a mechanical moment about a reference point of the frame having a value equal to a value of a mechanical moment of a force of gravity acting on the object table about said reference point, and a direction which is opposed to a direction of the mechanical moment of said force of gravity.
A lithographic device with a machine frame which, seen parallel to a vertical Z-direction, supports in that order a radiation source, a mask holder, a focusing system with a main axis directed parallel to the Z-direction, and a substrate holder which is displaceable perpendicularly to the Z-direction by means of a first positioning device with an object table and a drive unit by which the object table is displaceable parallel to at least an X-direction over a guide which is fastened to a frame of the first positioning device, wherein the first positioning device is provided with a force actuator system controlled by an electric controllerand exerting a compensation force on the frame during operation, the electric controller comprising a feedforward control loop and the compensation force has a mechanical moment about a reference point of the frame having a value equal to a value of a mechanical moment of a force of gravity acting on the object table about said reference point, and a direction which is opposed to a direction of the mechanical moment of said force of gravity, wherein the frame of the first positioning device belongs to the machine frame of the lithographic device, while the force actuator system of the first positioning device exerts the compensation force on the machine frame.
A lithographic device with a machine frame which, seen parallel to a vertical Z-direction, supports in that order a radiation source, a mask holder which is displaceable perpendicularly to the Z-direction by means of a first positioning device, a focusing system with a main axis directed parallel to the Z-direction, and a substrate holder which is displaceable perpendicularly to the Z-direction by means of a second positioning device wherein the first positioning device is with an object table and a drive unit by which the object table is displaceable parallel to at least an X-direction over a guide which is fastened to a frame of the first positioning device, wherein the first positioning device is provided with a force actuator system controlled by an electric controller and exerting a compensation force on the frame during operation, the electric controller comprising a feedforward control loop and the compensation force has a mechanical moment about a reference point of the frame having a value equal to a value of a mechanical moment of a force of gravity acting on the object table about said reference point, and a direction which is opposed to a direction of the mechanical moment of said force of gravity, wherein the frame of the first positioning device belongs to the machine frame of the lithographic device, while the force actuator system of the first positioning device exerts the compensation force on the machine frame.
Dependencies are inferred from the claim text.