Rubbing treating apparatus and rubbing treating method including suction passages to hold masking sheets in place

A rubbing treating apparatus, comprising:

• a stage for mounting thereon an electrode substrate provided with an alignment control film, a rubbing cloth for effecting rubbing treatment by rubbing it against the alignment control film,
• a rectangular frame-shaped masking sheet having a rectangular opening and a peripheral frame portion surrounding the opening, the masking sheet being mounted on the stage so as to cover a peripheral part of the electrode substrate, and
• a close-contact means for causing the masking sheet to selectively closely contact the electrode substrate at the peripheral frame portion while allowing the masking sheet to cover the peripheral part of the electrode substrate and expose a central part of the electrode substrate through the opening for rubbing at the time of the rubbing treatment;
• wherein the masking sheet is provided with at least one suction passage as the close-contact means directed to the electrode substrate at a position where the masking sheet abuts the electrode substrate, and the masking sheet is caused to closely contact the electrode substrate by sucking air between the masking sheet and the electrode substrate through at least one of said at least one suction passage so as to resist a shearing force acting between the masking sheet and the electrode substrate in a rubbing direction at the time of the rubbing treatment.

A rubbing treating method, comprising:

• covering at least a part of an alignment control film, provided to an electrode substrate mounted on a stage, with a rectangular frame-shaped masking sheet having a rectangular opening and a peripheral frame portion surrounding the opening, the masking sheet being mounted on the stage so as to cover a peripheral part of the electrode substrate, and
• selectively rubbing the alignment control film, wherein
• the masking sheet is caused to selectively closely contact the stage at the peripheral frame portion while covering the peripheral part of the electrode substrate and exposing a central part of the electrode substrate through the opening for rubbing at the time of the rubbing treatment;
• wherein the stage is provided with at least one suction passage as the holding means directed to the masking sheet at a position where the stage abuts the masking sheet, and the masking sheet is caused to closely contact and is held on the stage by suction through at least one of said at least one suction passage so as to resist a shearing force acting between the masking sheet and the stage in a rubbing direction at the time of the rubbing treatment.

A rubbing treating method, comprising:

• covering at least a part of an alignment control film, provided to an electrode substrate mounted on a stage, with a rectangular frame-shaped masking sheet having a rectangular opening and a peripheral frame portion surrounding the opening, the masking sheet being mounted on the stage so as to cover a peripheral part of the electrode substrate, and
• selectively rubbing the alignment control film, wherein
• the masking sheet is caused to selectively closely contact the stage at the peripheral frame portion while covering the peripheral part of the electrode substrate and exposing a central part of the electrode substrate through the opening for rubbing at the time of the rubbing treatment by exhausting air between the peripheral frame portion of the masking sheet and the peripheral part of the electrode substrate;
• wherein the masking sheet is provided with at least one suction passage as the close-contact means directed to the electrode substrate at a position where the masking sheet abuts the electrode substrate, and the masking sheet is caused to closely contact the electrode substrate by sucking air between the masking sheet and the electrode substrate through at least one of said at least one suction passage so as to resist a shearing force acting between the masking sheet and the electrode substrate in a rubbing direction at the time of the rubbing treatment.