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US 5,844,347 AGranted
Saw device and its manufacturing method
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsRyoichi Takayama, Keizaburo Kuramasu, Toshio Sugawa
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Abstract
A SAW device comprising an inter-digital electrode capable of withstanding application of excessive electric power, while preventing an increase of insertion loss. The SAW device has an inter-digital electrode formed by alternating layers of aluminum films and conductive films, where the conductive films have an elastic constant greater than that of the aluminum films.
Claims4
A SAW device comprising a piezoelectric substrate and inter-digital transducer electrode provided on a surface of said piezoelectric substrate,
- said inter-digital transducer electrode comprising a first material layer and a second material layer,
- said first material comprising alone aluminum,
- said second material comprising only one conductive material which has an elastic constant greater than the elastic constant of said first material, and
- said inter-digital transducer electrode comprising repetitive layers of said first material layer and said second material layer,
- wherein each of said films of said first material has a thickness of approximately 150 nm or less, and each of said films of said second material has a thickness less than the thickness of said films of said first material.
2 more elements
Dependencies are inferred from the claim text.