Polymers and chemically amplified positive resist compositions
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsOsamu Watanabe, Yoshihumi Takeda, Junji Tsuchiya, Toshinobu Ishihara
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Abstract
The invention provides a novel polymer comprising a recurring unit of formula. (1) wherein R.sup.1 is hydrogen or methyl, R.sup.2 is hydrogen or acid labile group, at least one R.sup.2 being hydrogen and at least one R.sup.2 being an acid labile group, and n=2 or 3. The polymer's Mw is 3,000-300,000. Blending the polymer as a base resin with an organic solvent and a photoacid generator yields a chemically amplified positive resist composition. ##STR1##
Claims7
A polymer comprising a recurring unit of at least one type of the following general formula (1) and having a weight average molecular weight of 3,000 to 300,000:
- ##STR23## wherein R.sup.1 is a hydrogen atom or methyl group, R.sup.2 is a hydrogen atom or acid labile group, at least one R.sup.2 being a hydrogen atom and at least one R.sup.2 being an acid labile group, and letter n is equal to 2 or 3.
A polymer of the following general formula (2) and having a weight average molecular weight of 3,000 to 300,000:
- ##STR24## wherein R.sup.1 is independently a hydrogen atom or methyl group, R.sup.2 is a hydrogen atom or acid labile group, at least one R.sup.2 being a hydrogen atom and at least one R.sup.2 being an acid labile group,
- R.sup.3 is an acid labile group,
- R.sup.4 is a hydrogen atom,
- R.sup.5 is a group represented by ##STR25## wherein X is a hydrogen atom or acid labile group and R.sup.6 is a hydrogen atom or an alkyl group of 1 to 6 carbon atoms, or
- R.sup.4 and R.sup.5, taken together, may form --C(O)--O--C(O)--,
- each of the units may be of one or more types,
- letter n is equal to 2 or 3,
- each of m and k is equal to 1, 2 or 3,
- p and q are positive numbers and r and s are 0 or positive numbers satisfying 0<(p+q)/(p+q+r+s).ltoreq.1 and the sum of p+q+r+s is a sufficient number to give the weight average molecular weight.
Dependencies are inferred from the claim text.