Low profile substrate ground probe
AssigneeInternational Business Machines Corporation
InventorDavid J. Pinckney
Life of this patent
Estimating the term…
Abstract
According to the preferred embodiment, the invention is a simplified, low profile, adjustable substrate ground probe used in electron beam photolithography processing. The low profile substrate ground probe is compatible with state-of-the-art, electron beam lithographic processing tools that require minimal clearance. The ground contact base incorporates a flexure, an adjustable ground contact base, and an adjustment screw which allows the height of the ground contact relative to the surface of the workpiece to be accurately and easily set, without using shims. The flexure is a one-piece probe body with a flame sprayed tungsten carbide ground contact surface.
Claims17
A substrate ground probe comprising:
- (a) an adjustable ground contact base;
- and
- (b) a one-piece flexure with a first end and a second end, the first end being attached to the adjustable ground contact base and the second end having a contact surface formed thereon, the contact surface having a flame sprayed tungsten carbide coating that provides an abrasive, durable conductive contact for the ground probe.
A substrate ground probe comprising:
- (a) an adjustable ground contact;
- (b) a one-piece flexure with a first end and a second end, the first end being attached to the adjustable ground contact base and the second end having a contact surface formed thereon, the contact surface having a flame sprayed tungsten carbide coating that provides a durable, conductive contact for the ground probe;
- and
- (c) an adjustment mechanism for adjusting the height of the contact surface relative to the ground contact base.
A substrate ground probe comprising:
- (a) an adjustable ground contact base, the adjustable ground contact base being formed with a cut out portion such that a substantially U-shaped body is formed, the body having an upper arm and a lower arm, the upper arm having a threaded aperture formed therein;
- (b) a one-piece titanium alloy flexure with a first end and a second end, the first end of the flexure being attached to the upper arm of the adjustable ground contact base and the second end of the flexure having a generally triangular contact surface formed thereon, the flexure having a middle portion which is thinner than the first end and the second end, the contact surface having a flame sprayed tungsten carbide coating;
- and
- (c) a threaded adjustment screw for adjusting the height of the contact surface relative to the lower arm of the ground contact base, the threaded adjustment screw having a first end, the threaded adjustment screw being threaded through the threaded aperture so that the first end of the adjustment screw contacts the lower arm of the adjustable ground contact base and such that turning the adjustment screw in one direction causes the distance between the upper arm and the lower arm to increase.
A method of grounding a substrate for electron beam photolithography, the method comprising the steps of:
- (a) providing a substrate ground probe, the ground probe comprising:
- an adjustable ground contact base, the adjustable ground contact base being formed with a cut out portion such that a substantially U-shaped body is formed, the body having an upper arm and a lower arm, the upper arm having a threaded aperture formed therein;
- a one-piece titanium alloy flexure with a first end and a second end, the first end of the flexure being attached to the upper arm of the adjustable ground contact base and the second end of the flexure having a generally triangular contact surface formed thereon, the flexure having a middle portion which is thinner than the first end and the second end, the contact surface having a flame sprayed tungsten carbide coating;
- and,
- a threaded adjustment screw for adjusting the height of the contact surface relative to the ground contact base, the threaded adjustment screw having a first end, the threaded adjustment screw being threaded through the threaded aperture so that the first end of the adjustment screw contacts the lower arm of the adjustable ground contact base;
- and
- (b) placing a substrate in contact with the contact surface.
Dependencies are inferred from the claim text.