CVD method of forming self-lubricating composites
AssigneeLockheed Martin Energy Systems, Inc.
InventorsTheodore M. Besmann, Peter J. Blau, Woo Y. Lee, Yong W. Bae
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Abstract
An article having a multiphase composite lubricant coating of a hard refractory matrix phase of titanium nitride dispersed with particles of a solid lubricating phase of molybdenum disulfide is prepared by heating the article to temperatures between 350.degree. and 850.degree. C. in a reaction vessel at a reduced pressure and passing a gaseous mixture of Ti((CH.sub.3).sub.2 N).sub.4, MoF.sub.6, H.sub.2 S and NH.sub.3 over the heated article forming a multiphase composite lubricant coating on the article.
Claims2
A method of preparing an article coated with a multiphase composite lubricant coating on the surface of said article comprising the following steps:
- Step 1. providing an article having a surface;
- Step 2. providing a gaseous mixture of a first metal species, a second metal species of molybdenum hexafluoride, hydrogen sulfide and ammonia;
- Step 3. heating said article having said surface to temperatures between 350.degree. C. and 850.degree. C. in a reaction vessel at a reduced pressure to form a heated article;
- Step 4. exposing said article in Step 3. to said gaseous mixture of Step 2. depositing substantially simultaneously a hard matrix phase and a discontinuous solid lubricant phase forming a multiphase composite coating on said surface of said article.
Dependencies are inferred from the claim text.