US 5,843,293 AGranted

Arc-type evaporator

AssigneeNissin Electric Co., Ltd.

InventorsHiroshi Murakami, Tadashi Kitagawa, Haruo Hiratsuka, Takaya Ishii, Koji Okamoto, Akira Doi

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Abstract

The arc-type evaporator of the present invention includes an anode and a cathode for generating arc discharging, a trigger electrode and a gas supply pipe. The trigger electrode is contacted with the cathode to cause a first spark, and thereafter is separated from the cathode to occur the arc discharge between the anode and the cathode. The gas supply pipe is provided independently of the trigger electrode, and supplies the cathode a reactive gas which reacts with a substance forming the cathode to produce a chemical compound. The gas supply pipe includes a gas blow-out port formed in the neighborhood of the side portion or rear side portion of the cathode to face the cathode. The reactive gas is supplied from the gas blow-out port to an area including the front surface of the cathode.

Claims8

Dependent claims

An arc-type evaporator comprising:

an anode and a cathode for generating arc discharge therebetween, said cathode having a front surface and a side portion with a periphery;
a trigger electrode for contacting said cathode to initiate an arc between said trigger electrode and said cathode;
a trigger electrode positioning system for moving said trigger electrode into and out of contact with said cathode;
and
a gas supply separate from said trigger electrode, for supplying a reactive gas to said cathode, said gas being disposed to react with the cathode material to produce a chemical compound, said gas supply including a ring-shaped portion encircling the periphery of the side portion of said cathode, said ring-shaped portion includes a periphery and a plurality of gas outlet ports dispersed around the periphery of said ring-shaped portion, said gas outlet ports being in flow communication with the front surface of said cathode.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application: 08/589,254Filed 23 Jan 1996
Priority: JP 7-2752423 Jan 1995
Granted: 1 Dec 1998
Term ends: Not estimatedThe source records don’t support an estimate.

Classification6 codes

H01J 37/32055
Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources: arc discharge
C23C 14/325
By explosion; by evaporation and subsequent ionisation of the vapours , e.g. ion-plating: electric arc evaporation
H01J 37/32009
Gas-filled discharge tubes: arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J 37/3244
Constructional details of the reactor: gas supply means