Method of developing an adhesive and a rotary holding table for carrying out the same method
AssigneeKitano Engineering Co., Ltd.
InventorMasami Inouchi
Life of this patent
Estimating the term…
Abstract
A method and apparatus for effectively developing an adhesive in a storage disc including differentiating a suction force applied from a surface of a rotary holding table from a drawing force applied from a boss. The method includes holding a storage disc on a rotary table by suction, the storage disc including two disc-shaped resin substrates each having a central hole and adhesive interposed therebetween. A boss of the rotary holding table is inserted into the central holes of the two disc-shaped resin substrates, and individual suction and drawing passages are provided for holding the storage disc on the rotary table and for drawing the adhesive by way of the boss, respectively.
Claims17
A method of coating an adhesive interposed between two disc-shaped resin substrates each having a central hole disposed therein and together forming a storage disc, said method comprising the steps of:
- placing the storage disc on a rotary table and inserting a boss of the rotary table into the central holes of the two disc-shaped resin substrates;
- rotating the storage disc to spread the adhesive between the two disc-shaped resin substrates;
- applying suction to the storage disc at a first pressure through a first passage disposed in the rotary table to hold the storage disc on the rotary table;
- and
- drawing the adhesive between the two disc-shaped resin substrates toward the central holes thereof by applying suction to a second passage opening at said boss at a second pressure different from said first pressure.
A rotary table for coating an adhesive interposed between two disc-shaped resin substrates each having a central hole disposed therein and together forming a storage disc, said rotary table comprising:
- a rotatable support member having an orifice disposed therein;
- a boss disposed centrally of said support member configured for insertion into the central holes of the two substrates, said boss having a drawing port disposed therein;
- a first passage in communication with said orifice and defining therein a first suction pressure for holding the storage disc on said support member during rotation of the storage disc;
- and
- a second passage in communication with said drawing port and defining therein a second suction pressure for drawing the adhesive toward the central holes of the two substrates, said first passage and said second passage being separate from one another and said first suction pressure being different than said second suction pressure.
A rotary holding table for coating an adhesive by placing a storage disc thereon and rotating the storage disc, the storage disc including two disc-shaped resin substrates each having a central hole and adhesive interposed therebetween, said rotary holding table comprising a part on which the storage disc is placed including suction holes for holding the storage disc thereon, a boss configured for insertion into the central holes of the two disc-shaped resin substrates and having a drawing port for drawing the adhesive, a suction passage communicating with said suction holes and a drawing passage communicating with said drawing port, said suction passage and said drawing passage being individually provided, said drawing passage being defined inside a rotary support shaft and said suction passage being defined between said rotary support shaft and a fixed support shaft for housing and supporting said rotary support shaft, said suction passage and said drawing passage being operable at different pressures from one another.
Dependencies are inferred from the claim text.