Process for recovering sulfur hexafluoride
AssigneeAlliedSignal Inc.
InventorsAmar Anumakonda, Romulus Gaita, Stephen Yates, Jim Zhou
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Abstract
The present invention provides a process for recovering sulfur hexafluoride ("SF.sub.6 ") from a gas stream using membrane separation.
Claims31
A process for recovering sulfur hexafluoride comprising the step of contacting a feed gas stream comprising a minor amount of sulfur hexafluoride and at least one non-condensible gas with a membrane under conditions suitable to form a sulfur hexafluoride-rich retentate gas stream and a sulfur hexafluoride-poor permeate gas stream.
A process for recovering sulfur hexafluoride comprising the step of contacting a feed gas stream comprising less than about 50 volume percent sulfur hexafluoride based on the total volume of the feed gas and at least one non-condensible gas selected from the group consisting of air, argon, carbon monoxide, carbon dioxide, helium, hydrogen, neon, nitrogen, and oxygen at a pressure of about 10 to about 90 psia with a membrane to form a sulfur hexafluoride-rich retentate gas stream and a sulfur hexafluoride-poor permeate gas stream.
A process for recovering sulfur hexafluoride comprising the step of contacting a feed gas stream comprising less than about 20 volume percent sulfur hexafluoride based on the total volume of the feed gas and at least one non-condensible gas selected from the group consisting of air, argon, carbon monoxide, carbon dioxide, helium, hydrogen, neon, nitrogen, and oxygen at a pressure of about 10 to about 90 psia with a membrane having a selectivity for the at least one non-condensible gas over sulfur hexafluoride of about 2.6 to form a sulfur hexafluoride-rich retentate gas stream and a sulfur hexafluoride-poor permeate gas stream.
Dependencies are inferred from the claim text.