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US 5,842,897 AGranted
Spacers for field emission display and their fabrication method
AssigneeInstitute for Advanced Engineering
InventorsHyo Soo Jeong, Young Rae Cho, Jae Yeol Oh
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Abstract
The invention is to provide the method for fabricating the spacers which are mechanically strong and have lower outgassing rate. Spacers in this invention are made of photosensitive glass. A net shaped photosensitive glass is etched by a first photolithography process and then the side wall of it is etched again by a second photolithography process for improving the efficiency of evacuation of the internal cavity of an FED.
Claims8
A method for fabricating a field emission display comprising the following steps:
- evaporating a transparent electrode on the lower part of a face plate, making said transparent electrode in a desired pattern, and coating a phosphor on said transparent electrode;
- forming in sequence a base plate opposite to said face plate, a cathode electrode on said base plate, emitter tips on said cathode electrode, dielectric layers on said cathode electrode and gate electrodes on said dielectric layers;
- forming net shaped photosensitive spacers using a first mask by a first lithography process;
- etching side walls of the first etched photosensitive glass by a second photolithography process, thereby forming the net shaped spacers being consisted of cross-shaped parts and U-shaped parts;
- aligning said face pate, said base plate and said spacers;
- and
- firing sealant material after coating said sealant material around edges of said face plate and said base plate.
4 more elements
Dependencies are inferred from the claim text.