Method and apparatus for modeling process control
AssigneeMotorola, Inc.
InventorsJeffrey A. Robinson, Udey Chaudhry, Timothy L. Olson
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Abstract
A method for process control which uses discrete lots in which each lot is uniquely identified. The process is modeled with a precedence rule which allows concurrent processing of each discrete lot. Lots are processed simultaneously within different processing steps in such a way as to maintain the unity of the lot while tracking the lot at all times during processing.
Claims22
A computer implemented method for modeling process tracking and control, including the steps of:
- selecting a lot for tracking where said lot has a plurality of units identified by a first lot identifier;
- selecting a process model of said lot from the computer;
- providing a plurality of rules of precedence to control process flow;
- applying one of the plurality of rules of precedence for linking a plurality of recordable process steps in said process model so that said lot resides at multiple locations in said plurality of recordable process steps while maintaining identification of said lot by said first lot identifier without splitting said lot into sublots;
- and
- updating a database within the computer to reflect said rule of precedence.
An apparatus for modeling process tracking and control, comprising:
- means for selecting a lot for tracking where said lot has a plurality of units identified by a first lot identifier;
- means for selecting a process model of said lot from a computer;
- means for providing a plurality of rules of precedence to control process flow;
- means for applying one of the plurality of rules of precedence for linking a plurality of recordable process steps in said process model so that said lot resides at multiple locations in said plurality of recordable process steps while maintaining identification of said lot by said first lot identifier without splitting said lot into sublots;
- and
- means for updating a database within said computer to reflect said rule of precedence.
A computer implemented method for modeling process tracking and control, including the steps of:
- selecting a lot for tracking where said lot has a plurality of units identified by a first lot identifier;
- selecting a concurrent process model of said lot from the computer;
- applying a start-start rule of precedence for linking a plurality of recordable process steps in said concurrent process model so that said lot resides at multiple locations in said plurality of recordable process steps while maintaining identification of said lot by said first lot identifier without splitting said lot into sublots;
- and
- updating a database within the computer to reflect said start-start rule of precedence.
A computer implemented method for modeling a semiconductor manufacturing process, comprising the steps of:
- processing a lot comprising a plurality of semiconductor devices where the lot is identified by a first lot identifier through a plurality of process steps;
- providing a plurality of rules of precedence to control process flow;
- and
- selecting one from among the plurality of rules of precedence to control process flow of the lot between first and second steps of the plurality of processing steps while maintaining identification of the lot comprising the plurality of semiconductor devices by the first lot identifier.
A computer implemented method of manufacturing a semiconductor device, comprising the steps of:
- processing a lot comprising a plurality of semiconductor devices where the lot is identified by a first lot identifier through a plurality of process steps;
- providing a plurality of rules of precedence to control process flow;
- and
- selecting one from among the plurality of rules of precedence to control process flow of the lot between first and second steps of the plurality of processing steps while maintaining identification of the lot comprising the plurality of semiconductor devices by the first lot identifier.
A computer implemented method for modeling a semiconductor manufacturing process, comprising the steps of:
- processing a lot comprising a plurality of semiconductor devices where the lot is identified by a first lot identifier through a plurality of process steps;
- and
- applying a start-start rule of precedence in which with a first semiconductor device of the lot residing at a first step of the plurality of process steps a second semiconductor device of the lot starts a second step of the plurality of process steps while maintaining identification of the lot comprising the first and second semiconductor devices by the first lot identifier.
Dependencies are inferred from the claim text.