Single chip modules, repairable multichip modules, and methods of fabrication thereof
AssigneeEPIC Technologies, Inc.
InventorCharles William Eichelberger
Life of this patent
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AssigneeEPIC Technologies, Inc.
InventorCharles William Eichelberger
Estimating the term…
Multichip and single chip modules are presented as well as a chips first fabrication of such modules. The multichip module comprises a plurality of chips affixed in a planar array by a structural material which surrounds the sides of the chips such that the upper surfaces of the chips and an upper surface of the structural material are co-planar and the lower surface of at least one chip and a lower surface of the structural material are co-planar. A photo-patternable dielectric is disposed directly on the upper surfaces of the chips. The photo-patternable dielectric includes vias to at least some contact pads at the upper surfaces of the chips and the module further comprises an intrachip metallization layer on the photo-patternable dielectric layer. Subsequent processing provides a multi-layer chip interconnect structure over the intrachip metallization layer and photo-patternable dielectric. Testing and repair of the module can be accomplished prior to or subsequent to fabrication of the multi-layer chip interconnect. Formation of multiple single chip modules is accomplished by singulating the multichip module into individual packages.
A multichip module comprising:
A multichip module comprising:
A multichip module comprising:
A multichip module comprising:
An integrated circuit chip module comprising:
An integrated circuit chip module comprising:
An integrated circuit chip module comprising:
A multichip module comprising:
A multichip module comprising:
Dependencies are inferred from the claim text.