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US 5,841,110 AGranted
Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems
AssigneeSteag AST
InventorsZsolt Nenyei, Heinrich Walk, Michael Maurer, Thomas Knarr
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Abstract
A method for Rapid Thermal Processing (RTP) is presented, wherein the broadband reflectivity of an object is measured, and the results of the measurement used by the RTP system to adjust the RTP system parameters used in processing the object.
Claims11
A method of rapid thermal processing (RTP) of an object using an RTP system, the object having a surface with a reflectivity, comprising;
- measuring the--spectrally integrated--reflectivity of the surface of the object in a broad band of wavelengths;
- and
- adjusting a system parameter of the RTP system in response to the measured--spectrally integrated--reflectivity.
A method of rapid thermal processing (RTP) of an object using an RTP system, the object having a surface with a reflectivity, comprising the following steps in order;
- a) introducing the object into a reaction chamber of an RTP system;
- b) irradiating the object with radiation from radiation sources of the RTP system;
- c) measuring the--spectrally integrated--reflectivity of the surface of the object in a broad band of wavelengths;
- and
- d) adjusting a system parameter of the RTP system in response to the measured reflectivity.
2 more elements
Dependencies are inferred from the claim text.