US 5,831,442 A · Handling device

Abstract

A handling device, in particular for handling probes of a wafer testing device, includes a receiving device for a probe being disposed in such a way as to be adjustable in a vertical direction and in a horizontal direction relative to at least one vertical bearer. The receiving device is guided adjustably in a horizontal direction on a supporting part. The supporting part is guided adjustably in a vertical direction on the at least one vertical bearer. Furthermore, a counterweight device is constructed so as to counterbalance the weight of the probe, the receiving device and the supporting part. The counterweight device includes a carrying device for receiving counterbalance weights. The carrying device is aligned horizontally and for parallel motion includes at least three suspension devices for fixing a connector which is turned round associated guide pulleys and is connected to the supporting part.

Claims27

Dependent claims

A handling device, comprising:

a probe;
at least one vertical bearer;
a supporting part being guided adjustably in a vertical direction on said at least one vertical bearer, and said supporting part having horizontal rails;
a receiving device for said probe mounted on said supporting part, said receiving device having linear bearings for engaging said horizontal rails of said supporting part and being guided adjustably in a horizontal direction on said horizontal rails of said supporting part;
guide pulleys;
a connector being turned around said guide pulleys and connected to said supporting part;
and
a counterweight device for counterbalancing the weight of said probe, said receiving device and said supporting part, said counterweight device having counterbalance weights, and a carrying device for receiving said counterbalance weights.

5 more elements

Dependencies are inferred from the claim text.

Handling device

Life of this patent

Handling device

Life of this patent

Abstract

Claims27