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US 5,831,181 AGranted
Automated tool for precision machining and imaging
AssigneeThe Regents of the University of California
InventorsArun Majumdar, Mohammed Dahleh, James Samir Ismail
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Abstract
A modified Atomic Force Microscope (AFM), which can machine and image the surface of a sample with nanometer precision in all three orthogonal directions by varying the depth-of-cut of the sample. A multi-repetitive sensor system is provided as is a radially halved quartered electrode to substantially maintain parallelism or substantial parallelism.
Claims16
A flexible tool capable of machining a sample at nanometer precision, comprising:
- (a) a cantilever;
- (b) means connected to said cantilever for machining the sample;
- and
- (c) means for varying the length of the cantilever whereby to control the stiffness of the cantilever to thereby control the depth-of-cut of the sample.
1 more element
Dependencies are inferred from the claim text.