Planar crossed-field plasma switch and method
AssigneeHughes Electronics Corporation
InventorDan M. Goebel
Life of this patent
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Abstract
A cold-cathode, crossed field switch has a magnet system which generates a magnetic field that is radially-oriented about a switch axis and a planar electrode system which generates an axially-oriented electric field. These structures facilitate a switch whose capacitance, inductance and fabrication costs are all reduced from that of conventional cold-cathode, crossed-field switches. Magnets of the magnet system are arranged in two concentric annular rings with their north and south poles aligned either axially or radially. The planar electrode system includes a cathode, a source grid, a control grid and an anode which are arranged in a substantially parallel relationship.
Claims20
A cold cathode, crossed field switch arranged about a switch axis and containing an ionizable gas, comprising:
- a magnet system configured to generate a magnetic field which surrounds said switch axis and is radially oriented outward from said switch axis;
- and
- a planar electrode system which includes:
- a) a planar cold cathode;
- b) a planar anode spaced from said cathode;
- c) a planar source grid positioned between said anode and said cathode and spaced from said cathode to form a source grid-to-cathode gap which substantially contains said radially-oriented magnetic field, said source grid and said cathode arranged to generate an axially-oriented electric field in said source grid-to-cathode gap in response to a source voltage applied to said source grid, said radially-oriented magnetic field and said axially-oriented electric field directing secondary ions from said cathode along cycloidal paths in said ionizable gas to generate a plasma source in said source grid-to-cathode gap;
- and
- d) a planar control grid positioned between said anode and said source grid, and spaced from said anode to form a control grid-to-anode gap, said control grid arranged to selectively receive first and second control voltages to initiate and terminate a plasma path which connects said plasma source and said anode across said control grid-to-anode gap.
A method for providing a switchable current path through a plasma, comprising the steps of:
- adjoining an ionizable gas with a cold cathode;
- establishing a magnetic field in said ionizable gas so that, in at least a portion of said ionizable gas, said magnetic field surrounds a magnetic-field axis and is radially oriented outward from said axis;
- establishing an electric field that is axially oriented in said ionizable gas portion along said magnetic-field axis so that said axially-oriented electric field and said radially-oriented magnetic field direct secondary electrons from said cathode along cycloidal paths in said ionizable gas portion to generate a plasma source;
- and
- selectively removing and forming an electrostatic shield between said plasma source and an anode to thereby initiate and terminate a plasma path between said plasma source and said anode, said plasma source and said plasma path forming said current path between said cathode and said anode.
A cold cathode, crossed field switch arranged about a switch axis and containing an ionizable gas, comprising:
- a magnet system having magnets arranged in coplanar and concentric magnet rings about said switch axis to generate a magnetic field which surrounds said switch axis and is radially oriented outward from said switch axis;
- a planar electrode system which includes:
- a) a planar cold cathode;
- b) a planar anode spaced from said cathode and positioned with said cathode between said anode and said magnet system;
- c) a planar source grid positioned between said anode and said cathode and spaced from said cathode to form a source grid-to-cathode gap which substantially contains said radially-oriented magnetic field, said source grid and said cathode arranged to generate an axially-oriented electric field in said source grid-to-cathode gap in response to a source voltage applied to said source grid, said radially-oriented magnetic field and said axially-oriented electric field directing secondary ions from said cathode along cycloidal paths in said ionizable gas to generate a plasma source in said source grid-to-cathode gap;
- and
- d) a planar control grid positioned between said anode and said source grid, and spaced from said anode to form a control grid-to-anode gap, said control grid arranged to selectively receive first and second control voltages to initiate and terminate a plasma path which connects said plasma source and said anode across said control grid-to-anode gap;
- a cylindrical dielectric member that supports said planar anode and contains said ionizable gas;
- and
- an annular shield member which extends from said anode into said control grid-to-anode gap to shield said dielectric member from sputtering impurities.
Dependencies are inferred from the claim text.