Treating liquid replacing method, substrate treating method and substrate treating apparatus
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorsYusuke Muraoka, Tutomu Takeuchi
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Abstract
A treating liquid first in a treating bath is replaced with a second treating liquid by supplying the second treating liquid to an upper position of the treating bath while discharging the first treating liquid from a lower position of the treating bath. The replacement is effected with a balance maintained between a quantity of the first treating liquid discharged and a quantity of the second treating liquid supplied. With this method, the first treating liquid in the treating bath is replaceable with a reduced quantity of the second treating liquid. This treating liquid replacing method allows a substrate to be treated efficiently with a plurality of treating liquids in one treating bath.
Claims12
A substrate treating apparatus having a treating bath for treating a substrate, said apparatus comprising:
- upper treating liquid supply means for supplying a treating liquid to an upper position of said treating bath;
- upper treating liquid discharge means for discharging a treating liquid from said upper position of said treating bath;
- lower treating liquid supply means for supplying a treating liquid to a lower position of said treating bath;
- lower treating liquid discharge means for discharging a treating liquid from said lower position of said treating bath;
- and
- treating liquid replacing means for discharging a first treating liquid in said treating bath from said lower position of said treating bath by said lower treating liquid discharge means while supplying a second treating liquid to said upper position of said treating bath by said upper treating liquid supply means, said first treating liquid being discharged and said second treating liquid being supplied by maintaining a balance between a quantity of said first treating liquid discharged and a quantity of said second treating liquid supplied, thereby replacing said first treating liquid with said second treating liquid.
Dependencies are inferred from the claim text.