Interface apparatus for automatic test equipment
AssigneeAESOP, Inc.
InventorsAlexander H. Slocum, Michael A. Chiu
Life of this patent
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Abstract
An interface between a test head portion of automatic test equipment and a handling device such as a prober. The interface employs preloaded kinematic couplings between the test head and the handling device and between the probe card and the test head. These couplings allow the probe card to be repeatedly positioned relative to the component in the handling device. They also reduce forces on the probe card to prevent distortion of the probe card. The interface provides separate mechanical and electrical loops such that mechanical precision is not dependant on the electrical structure.
Claims7
A mechanical interface used in a semiconductor test system designed to provide rapid and repeatable connection of a first component and a second component in the test system, the mechanical interface comprising:
- a) a plurality of contacts, each contact comprising:
- i) a first contact element on the first component of the test system;
- ii) a second contact element on the second component in the test system;
- iii) wherein the first and second contact elements are shaped and positioned to engage one another in a contact constraining motion in at least two degrees of freedom while allowing motion with at least two other degrees of freedom;
- b) means for latching the first component and the second component and drawing the first component and the second component together to a final position determined by the positioning of the plurality of contacts.
Dependencies are inferred from the claim text.