Fluid cooled trap
AssigneeMKS Instruments, Inc.
InventorsYoufan Gu, Dana S. Hauschultz
Life of this patent
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AssigneeMKS Instruments, Inc.
InventorsYoufan Gu, Dana S. Hauschultz
Estimating the term…
The liquid cooled trap for effectively and efficiently collecting condensable vapor in a chemical vapor reaction system includes two stages. The first stage includes an entrance area to the trap that is purposely designed to be large in space and a very poor heat exchanger in order to avoid condensation and resulting solid deposits that could clog the entrance port to the trap. The second stage comprises a better heat exchanger to spread the condensation and deposits efficiently over a larger surface area and a longer flow path. The second stage is a very efficient heat exchanger to clean up and remove whatever small amount of the condensable vapor remains after the first stage of the trap. The second stage includes cooling coil tubes and cooling cones or fins to increase the overall efficiency of the trap be increasing the interior surfaces upon which the flowing condensable vapor can condense, while not significantly reducing the flow conductance of the trap.
In a trap for deposition of a material in a gas stream, said trap having an entrance for said gas stream and an exit for said gas stream wherein said gas enters said trap through said entrance at a first temperature and exits said trap through said exit at a second temperature that is lower than said first temperature such that there is a temperature drop of said gas stream in said trap between said entrance and said exit that results from transfer of energy from said gas stream to the trap and causes deposition of said material in said trap, the improvement comprising:
A trap through which a gas stream may flow and capable of collecting material created by condensation of a gas or gases in the gas stream while the gas stream is flowing through the trap, said gas stream entering said trap at an initial temperature, comprising:
A trap for deposition of material in a gas stream having an entrance for the gas stream and an exit for the gas stream, wherein the gas stream enters the trap at an initial temperature and exits the trap at a second temperature, comprising:
Dependencies are inferred from the claim text.