Miniaturized fabry-perot spectrometer for optical analysis

A method for optical measuring comprising:

• integrating a detector, an electrically tunable Fabry-Perot interferometer and at least one of a radiation source and control electronics in a miniaturized fashion onto a common, planar substrate;
• emitting electromagnetic radiation, via the radiation source, for the optical measuring;
• detecting, via the detector, at least one of the radiation from the optical measuring;
• placing the interferometer in the path of the radiation prior to the detector, said placing including spacing the interferometer and the detector apart from one another on the substrate;
• and
• controlling, via the control electronics circuitry, the radiation source, the interferometer and the detector.

A spectrometer for optical measurement, said spectrometer comprising:

• a radiation source for admitting electromagnetic radiation for the optical measurement;
• a detector for detecting radiation from the optical measurement;
• an external mirror for directing radiation from the optical measurement onto the detector;
• an electrically tunable Fabry-Perot interferometer placed in the path of the radiation prior to the detector;
• and
• control electronics circuitry for controlling the radiation source, the interferometer and the detector, wherein
• the radiation source and at least one of the detector and the interferometer are integrated onto a common, planar substrate.

A method for optical measuring comprising:

• integrating a radiation source and at least one of a detector and an electrically tunable Fabry-Perot interferometer in a miniaturized fashion onto a common, planar substrate;
• emitting electromagnetic radiation, via the radiation source, for the optical measuring;
• detecting, via the detector, at least one of the radiation transmitted through and emitted from the gas;
• directing radiation form the optical measurement onto the detector;
• placing the interferometer in the path of the radiation prior to the detector;
• and
• controlling, via the control electronics circuitry, the radiation source, the interferometer and the detector.