Parallel ion optics and apparatus for high current low energy ion beams

An apparatus for manipulating ions, comprising:

• a plurality of electrode sheets having openings, said electrode sheets aligned substantially parallel such that said openings in said electrode sheets define a plurality of ion channels, each ion channel being defined by an opening in each of said plurality of electrode sheets;
• a plurality of spacers coupled between adjacent electrode sheets, said spacers positioned between adjacent ion channels;
• and
• an electronic device coupled to said electrode sheets, said electronic device selectively applying voltages to said electrode sheets in order to manipulate ions in said ion channels.

An apparatus for manipulating ions, comprising:

• a plurality of electrode sheets having openings, said electrode sheets aligned substantially parallel such that said openings in said electrode sheets define a plurality of ion channels, each ion channel being defined by an opening in each of said plurality of electrode sheets;
• said ion channels having a first packing pattern at one end and a second packing pattern at another end;
• and
• an electronic device coupled to said electrode sheets, said electronic device selectively applying voltages to said electrode sheets in order to manipulate ions in said ion channels.

An apparatus for manipulating ions, comprising:

• a plurality of electrode sheets having openings, said electrode sheets aligned substantially parallel such that said openings in said electrode sheets define a plurality of ion channels, each ion channel being defined by an opening in each of said plurality of electrode sheets;
• said ion channels being more densely packed at one end than another end;
• and
• an electronic device coupled to said electrode sheets, said electronic device selectively applying voltages to said electrode sheets in order to manipulate ions in said ion channels.

An apparatus for manipulating ions, comprising:

• a plurality of electrode sheets having openings, said electrode sheets aligned substantially parallel such that said openings in said electrode sheets define a plurality of ion channels, each ion channel being defined by an opening in each of said plurality of electrode sheets;
• at least one electrode sheet having a plurality of electrical connections, each electrical connection being electrically coupled to conductive material of said at least one electrode sheet bounding a subset of openings;
• and
• an electronic device coupled to said electrode sheets, said electronic device selectively applying voltages to said electrode sheets in order to manipulate ions in said ion channels.

An apparatus for manipulating ions, comprising:

• a plurality of electrode sheets having openings, said electrode sheets aligned substantially parallel such that said openings in said electrode sheets define a plurality of ion channels, each ion channel being defined by an opening in each of said plurality of electrode sheets;
• a plurality of openings in an electrode sheet correspond with an opening in an adjacent electrode sheet, whereby a plurality of ion channels become a single ion channel;
• and
• an electronic device coupled to said electrode sheets, said electronic device selectively applying voltages to said electrode sheets in order to manipulate ions in said ion channels.

An apparatus for manipulating ions, comprising:

• a plurality of electrode sheets having openings, said electrode sheets aligned substantially parallel such that said openings in said electrode sheets define a plurality of ion channels, each ion channel being defined by an opening in each of said plurality of electrode sheets;
• a gas manifold having openings into selected ion channels, whereby gas is injected into said selected ion channels through said openings;
• and
• an electronic device coupled to said electrode sheets, said electronic device selectively applying voltages to said electrode sheets in order to manipulate ions in said ion channels.

An apparatus for manipulating ions, comprising:

• a plurality of first electrode sheets having openings, said electrode sheets aligned substantially parallel such that said openings in said electrode sheets define a plurality of ion channels, each ion channel being defined by an opening in each of said plurality of electrode sheets;
• an array of electrodes, said electrodes of said array being substantially parallel to said ion channels and said ion channels extend between said electrodes of said array;
• and
• an electronic device coupled to said electrode sheets and said electrodes of said array, said electronic device selectively applying voltages to said electrode sheets and said electrodes in order to manipulate ions in said ion channels.

An apparatus for manipulating ions, comprising:

• a plurality of electrode sheets having openings, said electrode sheets aligned substantially parallel such that said openings in said electrode sheets define a plurality of ion channels, each ion channel being defined by an opening in each of said plurality of electrode sheets;
• a rotatable shaft, said electrode sheets being coupled to said shaft such that said ion channels are substantially parallel to said shaft;
• a motor coupled to said shaft to rotate said shaft;
• and
• an electronic device coupled to said electrode sheets, said electronic device applying voltages to said electrode sheets to retain selected ions in said ion channels when said ion channels are rotated by said motor.

An apparatus for manipulating ions, comprising:

• a plurality of electrode sheets having openings, said electrode sheets aligned substantially parallel such that said openings in said electrode sheets define a plurality of ion channels, each ion channel being defined by an opening in each of said plurality of electrode sheets;
• a vacuum enclosure enclosing said electrode sheets;
• a cryocondensation device to lower the temperature of said plurality of electrode sheets;
• and
• an electronic device coupled to said electrode sheets, said electronic device selectively applying voltages to said electrode sheets in order to manipulate ions in said ion channels.

A method of plasma ion extraction of ions from an ion source onto a substrate, comprising the steps of:

• introducing a plasma into a plurality of ion channels;
• selectively applying Rf voltages along said ion channels to generate inhomogeneous Rf fields;
• and
• said Rf fields extracting ions from said plasma.