Sputtering target with ultra-fine, oriented grains and method of making same

A method for making a sputtering target comprising:

• (a) melting a metal;
• (b) atomizing the molten metal;
• (c) producing a workpiece from the atomized metal;
• (d) extruding the workpiece through a die having contiguous, transverse inlet and outlet channels of substantially identical cross section, whereby the workpiece enters the inlet channel and exits the outlet channel, to produce an extruded article;
• (e) repeating the extrusion step (d) one or more times to produce a final extruded article with a desired texture;
• and
• (f) fabricating the final extruded article into a sputtering target.

A method for making a sputtering target comprising:

• (a) melting a metal comprising aluminum or aluminum alloy;
• (b) atomizing the molten metal;
• (c) producing a workpiece from the atomized metal;
• (d) extruding the workpiece through a die having contiguous, transverse inlet and outlet channels of substantially identical cross section, whereby the workpiece enters the inlet channel and exits the outlet channel;
• (e) repeating the extrusion step (d) one or more times to produce a final extruded article with predominantly <200>
• texture;
• and
• (f) fabricating the final extruded article into a sputtering target.

A method for making a sputtering target comprising:

• (a) melting a metal comprising aluminum or aluminum alloy;
• (b) atomizing the molten metal;
• (c) producing a workpiece from the atomized metal;
• (d) extruding the workpiece through a die having contiguous, transverse inlet and outlet channels of substantially identical cross section, whereby the workpiece enters the inlet channel and exits the outlet channel;
• (e) repeating the extrusion step (d) one or more times to produce a final extruded article with predominantly <110>
• texture;
• and
• (f) fabricating the final extruded article into a sputtering target.

A method for making a sputtering target comprising:

• melting a metal;
• atomizing the molten metal to produce metal droplets;
• collecting the metal droplets on a substrate to produce a workpiece;
• extruding the workpiece through a die containing contiguous, transverse inlet and outlet channels of substantially identical cross section, whereby the workpiece enters the inlet channel and exits the outlet channel to produce an extrusion having a predominantly <200>
• or <220>
• texture;
• and
• fabricating the extrusion into a sputtering target.