High purity nitrogen generator unit and method
AssigneeTeisan Kabushiki Kaisha
InventorShinji Tomita
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AssigneeTeisan Kabushiki Kaisha
InventorShinji Tomita
Estimating the term…
A high purity nitrogen generator unit which is excellent in the energy efficiency and the recovery of high purity nitrogen gas, is provided. In a rectification column 1, feed air is separated to oxygen-rich liquid air and nitrogen gas. The oxygen-rich liquid air in its bottom is reduced in pressure by a first expansion valve 21 and sent to a composition regulation column 3. The nitrogen gas in its top is condensed in a nitrogen condenser 2, the resulting liquid nitrogen is returned as a reflux liquid to the rectification column 1 and non-condensed gas is released. After oxygen-rich waste gas in the lower part of the composition regulation column 3 is reduced in pressure by an expansion turbine 6, it is released by way of a first heat exchanger 4. Mixed gas in the top of the composition regulation column 3 is introduced for re-circulation into a first compressor 5. Another portion of the mixed gas is returned to the composition regulation column 3 by way of a second compressor 7, second heat exchanger 8 and second expansion valve 22. The second compressor 7 is driven by means of the expansion turbine 6. High purity liquid nitrogen taken out of the vicinity of the top of the rectification column 1 is evaporated for recovery in the second heat exchanger 8.
A high purity nitrogen generator unit, which comprises:
A high purity nitrogen generator unit, which comprises:
A high purity nitrogen generator unit, which comprises:
A high purity nitrogen generator unit, which comprises:
A high purity nitrogen producing method which comprises, by use of a high purity nitrogen generator unit comprising:
Dependencies are inferred from the claim text.