US 5,804,889 AGranted

Un-interruptible power supply apparatus for diffusion furnace

AssigneeUnited Microelectronics Corp.

InventorsChu Lin Hu, Chin-Chuan Chung, Albert Sang, Kuo-Tunt Wei

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Abstract

A un-interruptible power supply (UPS) apparatus for a diffusion furnace used in semiconductor device fabrication. The diffusion furnace consists of a power electronic subsystem coupled to a three-phase utility power source via two series-connected normally-open main circuit breaker switches, an automatic control unit, and a direct-current power supply. The automatic control unit controls the operation of the diffusion furnace. The UPS apparatus includes a UPS unit having a power input connected to a node between the two series-connected normally-open main circuit breaker switches. A first normally-open circuit breaker has a switch connected between the output of the UPS unit and the power input of the automatic control unit. A second normally-open circuit breaker has a switch connected between a first phase power line of the three-phase utility power source and the input of the direct-current power supply. A third normally-closed circuit breaker has a switch connected to the output of the UPS unit. A fourth normally-open circuit breaker has a switch connected between the output of the UPS unit and the input of the direct-current power supply. In operation, the apparatus is switched on to maintain the power supply to the diffusion furnace for a predetermined time when there is a main power line failure.

Claims20

Dependent claims

A un-interruptable power supply apparatus for a diffusion furnace, the diffusion furnace including a power electronics subsystem coupled to a three-phase utility power source through first and second series-connected normally-open main power switches;

an automatic controller;
and a direct-current power supply;
wherein the automatic controller controls operation of the power electronics subsystem;
the apparatus comprising:
an un-interruptable power supply having a power input for connection to a node between the first and second series-connected normally-open main power switches, and a power output;
a first normally-open circuit breaker having a first circuit breaker switch to open and close electrical connection between the power output of said un-interruptable power supply and a power input of said automatic controller, the first circuit breaker switch having a first terminal connected to the power output of said un-interruptable power supply and a second terminal for connection to the power input of the automatic controller;
a second normally-open circuit breaker having a second circuit breaker switch to open and close electrical connection between a first phase power line of the three-phase utility power source and a power input of the direct-current power supply, the second circuit breaker switch having a first terminal for connection to an unswitched portion of the first phase power line and a second terminal for connection to the power input of the direct-current power supply;
a third normally-closed circuit breaker having a third circuit breaker switch to open and close electrical connection between the power output of said un-interruptable power supply and a system ground, the third circuit breaker switch having a first terminal connected to the power output of said un-interruptable power supply and a second terminal for connection to the system ground;
and
a fourth normally-open circuit breaker having a fourth circuit breaker switch to open and close electrical connection between the power output of said un-interruptable power supply and the power input of said direct-current power supply, the fourth circuit breaker switch having a first terminal connected to the power output of said un-interruptable power supply and a second terminal for connection to the power input of said direct-current power supply.

7 more elements

A diffusion furnace, comprising:

a power electronics subsystem;
first and second series-connected normally-open main power switches;
a three-phase utility power source coupled to said power electronics subsystem through said first and second series-connected normally-open main power switches;
an automatic controller for controlling said power electronics subsystem and including a power input;
a direct-current power supply having a power input;
an un-interruptable power supply having a power input connected to a node between said first and second series-connected normally-open main power switches, and a power output;
a first normally-open circuit breaker having a switch connected to open and close electrical connection between the power output of said un-interruptable power supply and the power input of said automatic controller;
a second normally-open circuit breaker having a switch connected to open and close electrical connection between an unswitched portion of a first phase power line of said three-phase utility power source and the power input of said direct-current power supply;
a third normally-closed circuit breaker having a switch connected to open and close electrical connection between the power output of said un-interruptable power supply and a system ground;
and
a fourth normally-open circuit breaker having a switch connected to open and close electrical connection between the power output of said un-interruptable power supply and the power input of said direct-current power supply.

8 more elements

Dependencies are inferred from the claim text.