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US 5,803,965 AGranted
Method and system for manufacturing semiconductor device
AssigneeLG Electronics Inc.
InventorJung Kee Yoon
Life of this patent
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Abstract
A method and system for manufacturing a semiconductor device having a semiconductor layer using a pulsed laser includes the steps of generating a laser beam using a solid laser source, generating a multi-harmonic wave from the laser beam using a multi-harmonic oscillator, filtering the multi-harmonic wave, and irradiating the filtered wave onto the semiconductor layer.
Claims25
A method of manufacturing a semi-conductor device including a semiconductor layer, the method comprising the steps of:
- generating a laser beam using a solid laser source;
- generating a multi-harmonic wave from the laser beam using a multi-harmonic oscillator;
- filtering the multi-harmonic wave;
- and
- irradiating the filtered wave onto the semiconductor layer to crystallize the semiconductor layer.
2 more elements
A system for manufacturing a semiconductor device having a semiconductor layer comprising:
- a solid laser source for producing a laser beam;
- an oscillator for generating a multi-harmonic wave in response to the laser beam;
- a filter for producing a wave having a wavelength corresponding to an absorption rate of the semiconductor layer;
- and
- an optical system for directing the filtered wave onto the semiconductor layer.
2 more elements
Dependencies are inferred from the claim text.