Liquid vaporizing apparatus
AssigneesMitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering Corporation
InventorsTooru Yamaguchi, Kouichirou Tsutahara, Takayuki Suenaga
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Abstract
A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.
Claims2
A liquid vaporizing apparatus comprising:
- a container for holding a liquid to be vaporized;
- a bubbling tube inserted into said container for vaporizing the liquid by blowing a gas into the liquid;
- a gas ejection pipe for ejecting blown gas and vaporized liquid outside of said container;
- a liquid-supply pipe for supplying the liquid into said container;
- temperature detection means for detecting the temperature of the liquid in said container;
- temperature adjustment means responsive to said temperature detection means for maintaining the liquid in said container at a predetermined temperature;
- and
- vaporizing-gas stabilizing means disposed at a junction of said gas ejection pipe with another pipe for controlling flow of the vaporized liquid flowing in said gas ejection pipe to a control valve.
Dependencies are inferred from the claim text.