Cantilevered microstructure

An actuator comprising:

• a movable structure;
• a substrate positioned adjacent said movable structure;
• plural cantilever actuators mounted on said substrate, each comprising:
• a cantilever arm having a length dimension extending between a proximal end connected to said substrate and a distal end, said cantilever arm comprising at least a first section and a second section, respectively disposed at different locations along said length dimension, said cantilever arm comprised of a material exhibiting a first thermal coefficient of expansion (TCE);
• first layer means positioned on a surface of said cantilever arm and along said first section, said first layer means exhibiting a second TCE which is different from the first TCE;
• second layer means positioned on a surface of said cantilever arm and along said second section, said second layer means exhibiting a third TCE which is different from the first TCE;
• and
• control means for selectively applying signals to said first layer means and/or said second layer means to cause a flexure of said cantilever arm so as to bring said distal end into contact with said movable structure to cause movement thereof.

An optical shutter comprising:

• an apertured structure including plural apertures;
• plural cantilever shutters mounted on said apertured structure, each shutter comprising:
• a cantilever shutter having a length dimension including a proximal end connected to said apertured structure and an extending portion for closing an adjacent aperture, said extending portion comprising a first section and a second section positioned at different locations along said length dimension and exhibiting a first thermal coefficient of expansion (TCE);
• first layer means positioned on a surface of said cantilever shutter and along said first section, said first layer means exhibiting a second TCE which is different from the first TCE;
• second layer means positioned on a surface of said cantilever shutter and along said second section, said second layer means exhibiting a third TCE which is different from the first TCE;
• and
• control means for selectively applying signals to said first layer means and/or said second layer means to cause a flexure of said cantilever shutter so as to move said extending portion to optically block said adjacent aperture or unblock said adjacent aperture.

A cantilever microstructure comprising:

• a substrate;
• a cantilever arm having a length dimension extending between a proximal end connected to said substrate and a distal end, said arm comprising a first section and a second section positioned at different locations along said length dimension and comprised of a material exhibiting a piezoelectric/electrostrictive characteristic;
• contact means positioned near said distal end;
• first electrode means positioned about said cantilever arm and along said first section, for causing, upon energization, movement of said first section;
• second electrode means positioned about said cantilever arm and along said second section, for causing, upon energization, movement of said second section;
• and
• control means for selectively applying signals to said first electrode means and/or said second electrode means to cause a flexure of said cantilever arm so as to bring said distal end into or out of contact with said contact means.