Polishing pad with elongated microcolumns
AssigneeMicron Technology, Inc.
InventorsTrung Tri Doan, Scott G. Meikle
Life of this patent
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Abstract
A polishing pad for use in chemical-mechanical planarization (CMP) of semiconductor wafers includes a multiplicity of elongated microcolumns embedded in a matrix material body. The elongated microcolumns are oriented parallel to each other and extend from a planarizing surface used to planarize the semiconductor wafers. The elongated microcolumns are uniformly distributed throughout the polishing pad in order to impart uniform properties throughout the polishing pad. The polishing pad can also include elongated pores either coaxial width or interspersed between the elongated microcolumns to provide uniform porosity throughout the polishing pad.
Claims17
A chemical-mechanical planarizing polishing pad for planarizing semiconductor wafers, comprising:
- a matrix body having a planarizing surface for planarizing the semiconductor wafers;
- and
- a plurality of elongated solid microcolumns positioned within the matrix body and extending inwardly from the planarizing surface, the microcolumns being substantially parallel to each other, distributed substantially uniformly throughout the matrix body, and abrasive relative to the semiconductor wafers.
A chemical-mechanical planarizing polishing pad for planarizing semiconductor wafers, comprising:
- a matrix body having a planarizing surface for planarizing the semiconductor wafers, the matrix body having a multiplicity of parallel, uniformly spaced, elongated pores extending from the planarizing surface into the matrix body, the pores enabling liquid to extend into the pores when the polishing pad is used to planarize the semiconductor wafers;
- and
- a plurality of solid, elongated microcolumns extending inwardly from the planarizing surface between a plurality of the elongated pores.
Dependencies are inferred from the claim text.