Electrostatically levitated conveyance apparatus and electrode thereof for electrostatic levitation

An electrostatically levitated conveyance apparatus using DC electrostatic attraction forces from a single side, comprising:

• (a) an electrostatic levitating electrode arrangement having an insulating substrate, an even plurality of electrostatic levitating electrodes which are separated and arranged uniformly on a single side of the insulating substrate, lead wires extending out from all of the electrodes from an outer side or underside thereof, and means for energizing alternate electrodes of said even plurality of electrodes through said lead wires with respective positive and negative voltages so that each pair of adjacent electrodes are energized with opposite polarity voltages;
• (b) a levitated body opposing said electrostatic levitating electrode arrangement;
• (c) a plurality of displacement sensors for sensing gaps between said respective electrostatic levitating electrodes and the levitated body;
• and
• (d) a controller for controlling the voltages applied to said electrostatic levitating electrodes such that said levitated body is attracted, held and conveyed without contact by electrostatic attraction forces owing to application of the positive and negative DC voltages to said electrostatic levitating electrodes, the levitated body being released from said electrostatic levitating electrodes by cutting off the voltages to said electrostatic levitating electrodes when the levitated body arrives at a predetermined position.