Microfabricated fluidic devices
AssigneeMemstek Products, LLC
InventorsAndrews S. Dewa, Christophe J. P. Sevrain
Life of this patent
Estimating the term…
Abstract
A microfabricated, remotely actuated fluid pump includes a LIGA-fabricated movable member disposed within a cavity. The LIGA-fabricated movable member and the cavity cooperate to (a) define a sufficiently small clearance therebetween to achieve effective pumping action while (b) presenting a sufficiently low-friction fit to enable remote actuation. Such a pump can take the form of a piston pump, a vane pump, a centrifugal pump, a gear pump, etc. Other fluidic devices including flow sensors, piston valves, hydraulic motors, nozzles, and connectors can be fabricated using similar principles.
Claims26
A microfabricated, remotely actuated fluid pump comprising:
- a cavity defined in a body, said cavity being defined by a process including exposing a material to radiation through an exposure mask;
- a movable member fabricated by a LIGA process, the movable member having a maximum dimension less than 5 centimeters, the movable member being disposed within the cavity;
- means for sealing the cavity to define a pump chamber having the movable member contained therein, the pump chamber defining an inlet and an outlet;
- and
- a drive member disposed outside the pump chamber and coupled to the movable member therein to remotely actuate same;
- wherein the LIGA-fabricated movable member and the cavity cooperate to (a) define a sufficiently small clearance therebetween to achieve effective pumping action while (b) presenting a sufficiently low-friction fit to enable said remote actuation.
Dependencies are inferred from the claim text.