Liquid vaporizing apparatus
AssigneesMitsubishi Denki Kabushiki Kaisha, Ryoden Semiconductor System Engineering Corporation
InventorsTooru Yamaguchi, Kouichirou Tsutahara, Takayuki Suenaga
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Abstract
A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.
Claims4
A liquid vaporizing apparatus comprising:
- a plurality of containers for holding a liquid to be vaporized;
- a bubbling tube inserted into the liquid in each of said containers for vaporizing the liquid by blowing a gas into the liquid;
- a gas ejection pipe for each of said containers for ejecting the blown gas and vaporized liquid outside of said containers;
- a liquid-supply pipe for supplying the liquid into each of said containers;
- temperature detection means for each of said containers for detecting the temperature of the liquid in each of said containers;
- and
- temperature adjustment means for each of said containers responsive to the temperatures detected by said temperature detection means for maintaining the liquid in said containers at a predetermined temperature, wherein each of said gas ejection pipes connected to said containers is branched into two sections, each section having a valve, a first group of branched pipes is connected to a portion in which the vaporized liquid is used, a second group of branched pipes is connected to an exhaust pipe, and said branched gas ejection pipes are joined together after branching and before connection to a portion in which the vaporized liquid is used.
Dependencies are inferred from the claim text.