Gas-friction vacuum indicator with a gas-friction sensor rotating about a fixed axis of rotation
AssigneesForschungszentrum Julich GmbH, RWD-Datentechnik GmbH
InventorsBernd Lindenau, Johan K. Fremerey, Klaus Witthauer
Life of this patent
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Abstract
A gas-friction vacuum meter has, in addition to the magnetic system for contactlessly suspending the gas sensor, a device for measuring the actual inclination of the rotation axis of that sensor and corrects the measured value for the inclination by comparison of the output signal of this device with an Eddy-current conditioned braking value obtained for a certain inclination angle of the rotation axis.
Claims6
A gas-friction vacuum meter comprising:
- means for forming an evacuatable measuring chamber connectable to a vacuum to be measured;
- a gas-friction sensor rotatable in said chamber about a generally horizontal fixed rotation axis at an actual angle of inclination to a vertical;
- means for producing a magnetic field symmetrical about said axis and contactlessly supporting said sensor whereby a change in rotation of said sensor represents a measurement of said vacuum;
- means responsive to said change in rotation for producing a measured pressure value representing pressure of said vacuum;
- means for determining, by eddy current braking of said gas-friction sensor, at least one eddy-current-conditioned braking value for a certain inclination angle of said rotation axis;
- and
- means for measuring said actual inclination angle and producing an output signal for correction of said measured pressure value by comparison of said output signal with said eddy-current-conditioned braking value.
A method of operating a gas-friction vacuum meter wherein a gas friction sensor rotatable in an evacuatable measuring chamber has a generally horizontal fixed rotation axis at an actual angle of inclination to a vertical, said method comprising the steps of:
- (a) contactlessly supporting said sensor by producing a magnetic field symmetrical about said axis and rotating said sensor so that, when said chamber is connected to a vacuum to be measured, a change in rotation of said sensor represents a measurement of said vacuum;
- (b) obtaining at least one eddy-current conditioned braking value of said gas friction sensor for a certain inclination angle of said rotation axis;
- (c) detecting said change in rotation and producing a measured pressure value representing pressure of said vacuum;
- and
- (d) measuring said actual inclination angle and producing an output signal for correction of said measured pressure value by comparison of said output signal with said eddy-current conditioned braking value.
Dependencies are inferred from the claim text.