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US 5,776,216 AGranted
Vacuum pump filter for use in a semiconductor system
AssigneeVanguard International Semiconductor Corporation
InventorVince W. H. Yang
Life of this patent
Estimating the term…
Abstract
A vacuum pump filter for filtering debris from a semiconductor system is disclosed. The vacuum pump filter includes an inlet port for connecting to a chamber. A first filter holder is connected to the inlet port for filtering large debris. A second filter holder for filtering middle debris is connected to the first filter holder. A third filter holder is connected to the second filter holder for filtering small debris. A outlet port is connected to the third filter holder via a terminal. The other terminal of the outlet port is connected to a pump system.
Claims18
A filter assembly for use in a semiconductor fabrication system, said filter assembly comprising:
- an inlet port used to connect to a port of a semiconductor system, said inlet port comprising:
- (i) a first cylinder having a first terminal and a second terminal, said first cylinder connected to said port of said semiconductor system via said first terminal;
- and
- (ii) a second cylinder having first internal spiral threads, said second cylinder coaxially connected to said first cylinder via said second terminal of said first cylinder;
- a first filter holder having a first filter, said first filter holder having first external spiral threads for connecting to said first internal spiral threads of said second cylinder and second internal spiral threads;
- a second filter holder having a second filter, said second filter holder having second external spiral threads for connecting to said second internal spiral threads of said first filter holder and a third internal spiral threads;
- a third filter holder having a third filter, said third filter holder having third external spiral threads for connecting to said third internal spiral threads of said second filter holder and fourth internal spiral threads, wherein said first filter, second filter and said third filter are mesh nets having holes, wherein said first filter has the largest holes and said third filter has the smallest holes;
- and
- an outlet port used to connect to a pump system, said outlet port including fourth external spiral threads for connecting to said fourth internal spiral threads of said third filter holder.
6 more elements
A filter assembly for use in a semiconductor fabrication system, said filter assembly comprising:
- an inlet port used to connect to a port of a semiconductor system, said first inlet port including first internal connection means;
- a first filter holder having a first filter, first external connection means for connecting to said first internal connection means, and second internal connection means;
- a second filter holder having a second filter, second external connection means for connecting to said second internal connection means, and third internal connection means;
- a third filter holder having a third filter, third external connection mean for connecting to said third internal connection means, and fourth internal connection means, wherein said first filter, second filter and said third filter are mesh nets having holes, wherein said first filter has the largest holes and said third filter has the smallest holes;
- and
- an outlet port used to connect to a pump system, said outlet port including fourth external connection means for connecting to said fourth internal connection means of said third filter holder.
3 more elements
A filter assembly for use in a semiconductor fabrication system, said filter assembly comprising:
- an inlet port used to connect to a port of a semiconductor system, said inlet port comprising:
- (i) a first cylinder having a first terminal and a second terminal, said first cylinder connected to said port of said semiconductor system via said first terminal;
- and
- (ii) a second cylinder having a first internal spiral threads, said second cylinder coaxially connected to said first cylinder via said second terminal of said first cylinder;
- a first filter holder having a first filter, said first filter holder having first external spiral threads for connecting to said first internal spiral threads of said second cylinder and second internal spiral threads;
- a second filter holder having a second filter, said second filter holder having second external spiral threads for connecting to said second internal spiral threads of said first filter holder and a third internal spiral threads;
- a third filter holder having a third filter, said third filter holder having third external spiral threads for connecting to said third internal spiral threads of said second filter holder and forth internal spiral threads, wherein said first filter, second filter and said third filter are mesh nets having holes, wherein said first filter has the largest holes and said third filter has the smallest holes, wherein said first, second, and third filters are made from a magnetic material;
- and
- an outlet port used to connect to a pump system, said outlet port including fourth external spiral threads for connecting to said fourth internal spiral threads of said third filter holder.
6 more elements
Dependencies are inferred from the claim text.