High temperature superconducting electric field effect device and a method for fabricating the same

A method for manufacturing a high temperature superconducting electric field effect device comprises the steps of:

• (a) forming a high temperature superconducting thin film on a substrate, to thereby form a high temperature source and a high temperature drain with a predetermined thickness;
• (b) growing an oxide on the substrate and etching the grown oxide to thereby form a bottom layer;
• (c) forming and etching said high temperature superconducting thin film on said bottom layer, the high temperature source and the high temperature drain being a c-axis superconductor thin film, to thereby form a high temperature superconducting thin film channel layer and a dual grain boundary channel region;
• (d) depositing and etching a gate insulating layer on the channel region, to thereby form the gate insulating layer;
• and
• (e) forming a metal electrode layer on the high temperature source, the high temperature drain and the gate insulating layer.