Method and apparatus for energy beam machining
AssigneesEbara Corporation, Yotaro Hatamura
InventorsMasahiro Hatakeyama, Katsunori Ichiki, Tadasuke Kobata, Masayuki Nakao, Yotaro Hatamura
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Abstract
An energy beam is irradiated to a workpiece through a beam transmission hole defined in a mask. At that time, a relative position between an energy beam source and the mask or the mask and the workpiece is changed, so that machining depth of the workpiece is varied depending on machining portions of the workpiece, which correspond to amounts of irradiation of the energy beam. With this method, a machined product having locally different depths very easily can be made and further the product can be machined to desired depths with high accuracy by a single machining operation in a short time.
Claims34
A method of machining a pattern in a workpiece, said method comprising:
- emitting an energy beam from an energy beam source;
- passing a portion of said energy beam through a beam transmission hole of a predetermined shape defined in a mask, to thereby form a shaped energy beam having a shape corresponding to said predetermined shape;
- irradiating said shaped energy beam onto said workpiece and thereby machining said workpiece;
- and
- changing at least one of a relative positional relationship between said energy beam source and said mask and a relative positional relationship between said mask and said workpiece, and thereby machining said pattern into said workpiece while changing an amount of irradiation of said shaped energy beam onto different portions of said workpiece and thus controlling the depth of machining thereof.
An apparatus for machining a pattern in a workpiece, said apparatus comprising:
- an energy beam source for emitting an energy beam;
- a mask positioned between said energy beam source and the workpiece to be machined and toward which said energy beam is directed, said mask having a beam transmission hole of a predetermined shape for forming a shaped energy beam of said predetermined shape, such that said shaped beam is irradiated onto the workpiece to thereby machine the workpiece;
- and
- control means for changing at least one of a relative positional relationship between said energy beam source and said mask and a relative positional relationship between said mask and the workpiece, and thereby machining said pattern into the workpiece while changing an amount of irradiation of said shaped energy beam onto different portions of the workpiece and thus controlling the depth of machining thereof.
Dependencies are inferred from the claim text.