Surface-capacitor type condensable-vapor sensor
OwnerJon Geistinventor
Life of this patent
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Abstract
Vapor-deposition polymerization films serve as vapor-sensitive dielectrics (130, 530) over surface-type capacitive electrodes (110 and 120, 510 and 520), or as protective layers (140, 142) over vapor-sensitive dielectrics (132) or flux-concentrators (150) in surface-type capacitive-electrode vapor sensors. Arrays of sensors (411-422) with different vapor-deposition polymerization films provide selectivity among different vapor species. Vapor-sensitive films (530) covering surface-type capacitive electrodes (510, 520) cointegrated with heater elements (560, 570) on thermally isolated suspended substrates (500) provide selectivity among different vapor species.
Claims19
A condensable-vapor sensor of the surface-capacitor type, comprising
- (a) an electrically insulating substrate,
- (b) a pair of electrodes situated on said electrically insulating substrate, said pair of electrodes being selected from the group of pairs of interdigitated electrodes, pairs of spiral electrodes, and combinations of said pairs of electrodes,
- (c) a dielectric layer in functional relationship with said pair of electrodes,
- wherein said dielectric layer is a polyxylylene polymer.
A condensable-vapor sensor of the surface-capacitor type, comprising
- (a) an electrically insulating substrate,
- (b) a pair of electrodes situated on said electrically insulating substrate, said pair of electrodes being selected from the group consisting of pairs of interdigitated electrodes, pairs of spiral electrodes, and combinations of said pairs of interdigitated electrodes and said pairs of spiral electrodes,
- (c) a dielectric layer in functional relationship with said pair of electrodes,
- (d) a protective layer in functional relationship with said dielectric layer, said protective layer being located on the same side of said electrically insulating substrate as said dielectric layer,
- wherein said protective layer is a vapor deposition polymer.
The condensable-vapor sensor of 4 further including a field concentrator between said dielectric layer and said protective layer.
A condensable-vapor sensor of the surface-capacitor type, comprising
- (a) an integrated-circuit chip defining a pit,
- (b) an electrically insulating substrate supported by said integrated circuit chip, said electrically insulating substrate being suspended over said pit,
- (c) a pair of electrodes supported by said electrically insulating substrate, said pair of electrodes being selected from the group consisting of pairs of interdigitated electrodes, pairs of spiral electrodes, and combinations of said pairs of interdigitated electrodes and said pairs of spiral electrodes,
- (d) a dielectric layer in functional relationship with said pair of electrodes,
- wherein said dielectric layer is a vapor deposition polymer.
The condensable-vapor sensor of 9 further including a temperature sensor supported by said electrically insulating substrate.
The condensable-vapor sensor of 9 further including a heater supported by said electrically insulating substrate.
Dependencies are inferred from the claim text.